Invention Application
- Patent Title: HYBRID DESIGN LAYOUT TO IDENTIFY OPTICAL PROXIMITY CORRECTION-RELATED SYSTEMATIC DEFECTS
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Application No.: PCT/US2019/036640Application Date: 2019-06-12
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Publication No.: WO2019245806A1Publication Date: 2019-12-26
- Inventor: PARK, Allen , JAIN, Ankit
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Agency: MCANDREWS, Kevin et al.
- Priority: US62/688,271 20180621; US16/200,060 20181126
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; H01L27/02
Abstract:
Defects can be identified using a hybrid design layout that includes a printable layer and a non-printed layer. The hybrid design layout can be generated by incorporating at least a portion of the non-printable layer layout with the printable layer layout. Defects can be identified using optical or scanning electron beam images.
Information query
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