Invention Application
- Patent Title: ADDITIVES TO IMPROVE PARTICLE DISPERSION FOR CMP SLURRY
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Application No.: PCT/US2020/024131Application Date: 2020-03-23
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Publication No.: WO2020198102A1Publication Date: 2020-10-01
- Inventor: LEE, Yang-Yao , WU, Hsin-Yen , KO, Cheng-Yuan , LU, Lung-Tai , HUANG, Hung-Tsung
- Applicant: CABOT MICROELECTRONICS CORPORATION
- Applicant Address: 870 North Commons Drive Aurora, Illinois 60504 US
- Assignee: CABOT MICROELECTRONICS CORPORATION
- Current Assignee: CABOT MICROELECTRONICS CORPORATION
- Current Assignee Address: 870 North Commons Drive Aurora, Illinois 60504 US
- Agency: OMHOLT, Thomas
- Priority: US62/823,258 20190325
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; B24B37/04
Abstract:
The invention provides a chemical-mechanical polishing composition comprising (a) about 0.05 wt.% to about 10 wt.% of an abrasive; (b) a dispersant, wherein the dispersant is a linear or branched C 2 -C 10 alkylenediol; and (c) water, wherein the chemical-mechanical polishing composition has a pH of about 2 to about 6. The invention also provides a method of chemically-mechanically polishing a substrate by contacting the substrate with the inventive chemical-mechanical polishing composition.
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