Invention Application
- Patent Title: PARALLEL FREE-HANGING MICRO MACHINED CHANNELS AND METHOD FOR THE MANUFACTURING THEREOF
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Application No.: PCT/NL2020/050579Application Date: 2020-09-18
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Publication No.: WO2021054830A1Publication Date: 2021-03-25
- Inventor: ZHAO, Yiyuan , VELTKAMP, Henk-Willem , SCHUT, Thomas Victor Paul , DE BOER, Meint Jelle , WIEGERINK, Remco John , GROENESTEIJN, Jarno , LÖTTERS, Joost Conrad
- Applicant: BERKIN B.V. , STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN , UNIVERSITEIT TWENTE
- Applicant Address: Nijverheidsstraat 1A; Van Vollenhovenlaan 661; Drienerlolaan 5
- Assignee: BERKIN B.V.,STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN,UNIVERSITEIT TWENTE
- Current Assignee: BERKIN B.V.,STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN,UNIVERSITEIT TWENTE
- Current Assignee Address: Nijverheidsstraat 1A; Van Vollenhovenlaan 661; Drienerlolaan 5
- Agency: ALGEMEEN OCTROOI- EN MERKENBUREAU B.V.
- Priority: NL2023869 2019-09-20
- Main IPC: B81C1/00
- IPC: B81C1/00
Abstract:
A method for manufacturing a pair of parallel micro machined channels, using a substrate of a first material and comprising the steps of: - forming two primary perforations in said substrate, spaced apart from each other by a distance that is larger than a width of the channels to be formed; - forming two channel outlines in said substrate, the two channel outlines being spaced apart from each other; - filling the outer circumferential surface of the two channel outlines with a second material, to form said first micro machined channel and said second micro machined channel; - forming two secondary perforations in said substrate, at positions radially outside of the micro machined channels formed in the previous step; - forming two ducts in said substrate, while ensuring that some of the substrate-forming first material remains present between the channels.
Information query