- 专利标题: THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME
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申请号: PCT/CN2019/108891申请日: 2019-09-29
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公开(公告)号: WO2021056513A1公开(公告)日: 2021-04-01
- 发明人: ZHU, Hongbin
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: Room 7018, No.18, Huaguang Road, Guandong Science and Technology Industrial Park, East Lake Development Zone
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: Room 7018, No.18, Huaguang Road, Guandong Science and Technology Industrial Park, East Lake Development Zone
- 代理机构: NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD.
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
A 3D memory device (100) includes a substrate (102), a gate electrode (104) above the substrate (102), a blocking layer (106) on the gate electrode (104), a plurality of charge trapping layers (108a, 108b, 108c) on the blocking layer (106), a tunneling layer (110) on the plurality of charge trapping layers (108a, 108b, 108c), and a plurality of channel layers (112a, 112b, 112c) on the tunneling layer (110). The plurality of charge trapping layers (108a, 108b, 108c) are discrete and disposed at different levels. The plurality of channel layers (112a, 112b, 112c) are discrete and disposed at disposed at different levels. Each of the channel layers (112a, 112b, 112c) corresponds to a respective one of the charge trapping layers (108a, 108b, 108c).
IPC分类: