Invention Application
- Patent Title: MICRO-ELECTROMECHANICAL (MEM) POWER RELAY
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Application No.: PCT/US2020/060573Application Date: 2020-11-13
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Publication No.: WO2021097337A1Publication Date: 2021-05-20
- Inventor: PATIL, Prashant , GERSHENFELD, Neil
- Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- Applicant Address: 77 Massachusetts Ave.
- Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- Current Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- Current Assignee Address: 77 Massachusetts Ave.
- Agency: GREENSPOON, Robert, P.
- Priority: US62/934,770 2019-11-13
- Main IPC: H01H59/00
- IPC: H01H59/00 ; H01H1/50
Abstract:
A micro-electromechanical (MEM) relay and its fabrication process. The MEM relay includes a movable actuator electrode anchored to a substrate with two cantilever beams. Below the actuator electrode, there are three fixed electrodes. These three electrodes are the gate, the input, and the output contacts. The square base of the actuator electrode, and the square gate electrode below it, form an electrostatic parallel-plate actuator. When a voltage is applied between the actuator electrode and the gate electrode, the actuator electrode is pulled-down due to electrostatic attraction closing the relay. When the voltage is removed, the cantilever beams act as springs opening the relay.
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