Invention Application
- Patent Title: TRENCHED POWER DEVICE WITH SEGMENTED TRENCH AND SHIELDING
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Application No.: PCT/US2021/029306Application Date: 2021-04-27
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Publication No.: WO2021222180A1Publication Date: 2021-11-04
- Inventor: LICHTENWALNER, Daniel, Jenner
- Applicant: CREE, INC.
- Applicant Address: 4600 Silicon Drive
- Assignee: CREE, INC.
- Current Assignee: CREE, INC.
- Current Assignee Address: 4600 Silicon Drive
- Agency: SABAPATHYPILLAI, Rohan, G.
- Priority: US16/863,399 2020-04-30
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/16 ; H01L29/20 ; H01L21/336 ; H01L29/417 ; H01L29/10 ; H01L21/331
Abstract:
A semiconductor device includes a semiconductor layer structure of a wide band-gap semiconductor material. The semiconductor layer structure includes a drift region having a first conductivity type and a well region having a second conductivity type. A plurality of segmented gate trenches extend in a first direction in the semiconductor layer structure. The segmented gate trenches include respective gate trench segments that are spaced apart from each other in the first direction with intervening regions of the semiconductor layer structure therebetween. Related devices and fabrication methods are also discussed.
Information query
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