Invention Application
- Patent Title: MONOBLOC PEDESTAL FOR EFFICIENT HEAT TRANSFER
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Application No.: PCT/US2021/035329Application Date: 2021-06-02
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Publication No.: WO2021247627A1Publication Date: 2021-12-09
- Inventor: AGARWAL, Prahalad Narasinghdas
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: 4650 Cushing Parkway
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: 4650 Cushing Parkway
- Agency: WIGGINS, Michael D. et al.
- Priority: US63/033,979 2020-06-03
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; C23C16/458 ; H01J37/32 ; H01J37/32715 ; H01J37/32724 ; H01L21/67103 ; H01L21/68785
Abstract:
A substrate support for a substrate processing system includes a monobloc pedestal plate with a first surface configured to support a substrate and a second surface configured to interface with a pedestal stem. A groove is formed in the second surface of the monobloc pedestal plate. The groove has a serpentine shape and a depth of the groove extends upward from the second surface of the monobloc pedestal plate. A heater coil is arranged within the groove. A gap is defined between the heater coil and the second surface of the monobloc pedestal plate and a gap material is arranged within the gap to seal the heater coil within the groove.
Information query
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