Invention Application
- Patent Title: SEQUENCER TIME LEAPING EXECUTION
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Application No.: PCT/US2021/038756Application Date: 2021-06-23
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Publication No.: WO2021262890A1Publication Date: 2021-12-30
- Inventor: WANG, Chongyang
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 Bowers Avenue
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 Bowers Avenue
- Agency: PORTNOVA, Marina et al.
- Priority: US16/911,244 2020-06-24
- Main IPC: G05B19/04
- IPC: G05B19/04 ; G05B19/418 ; H01L21/67 ; G05B19/4187 ; G05B19/41875 ; H01L21/67276
Abstract:
A method includes receiving a plurality of operations in a sequence recipe. The plurality of operations are associated with processing a plurality of substrates in a substrate processing system. The method further includes identifying a plurality of completion times corresponding to the plurality of operations. Each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations. The method further includes simulating the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe. The method further includes causing, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
Information query
IPC分类: