Invention Application
- Patent Title: STRUCTURE WITH CONDUCTIVE FEATURE AND METHOD OF FORMING SAME
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Application No.: PCT/US2021/073169Application Date: 2021-12-29
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Publication No.: WO2022147459A1Publication Date: 2022-07-07
- Inventor: UZOH, Cyprian, Emeka
- Applicant: INVENSAS BONDING TECHNOLOGIES, INC.
- Applicant Address: 3025 Orchard Parkway
- Assignee: INVENSAS BONDING TECHNOLOGIES, INC.
- Current Assignee: INVENSAS BONDING TECHNOLOGIES, INC.
- Current Assignee Address: 3025 Orchard Parkway
- Agency: CHRISTENSEN, Michael, R.
- Priority: US63/132,334 2020-12-30
- Main IPC: H01L23/00
- IPC: H01L23/00
Abstract:
An element is disclosed. The element can include a non-conductive structure having a non-conductive bonding surface, a cavity at least partially extending through a portion of a thickness of the non-conductive structure from the non-conductive bonding surface, and a conductive pad disposed in the cavity. The cavity has a bottom side and a sidewall. The conductive pad has a bonding surface and a back side opposite the bonding surface. An average size of the grains at the bonding surface is smaller than an average size of the grains adjacent the bottom side of the cavity. The conductive pad can include a crystal structure with grains oriented along a 111 crystal plane. The element can be bonded to another element to form a bonded structure. The element and the other element can be directly bonded to one another without an intervening adhesive.
Information query
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