Invention Application
- Patent Title: COOLED SYSTEM-ON-WAFER WITH MEANS FOR REDUCING THE EFFECTS OF ELECTROSTATIC DISCHARGE AND/OR ELECTROMAGNETIC INTERFERENCE
-
Application No.: PCT/US2022/018348Application Date: 2022-03-01
-
Publication No.: WO2022192034A1Publication Date: 2022-09-15
- Inventor: PANG, Mengzhi , SUN, Yang , LI, Yong guo , LI, Jianjun , NAVARRETE, Rodrigo Rodriguez , KRITHIVASAN, Vijaykumar , BHANDARI, Rishabh
- Applicant: TESLA, INC.
- Applicant Address: 13101 Harold Green Road
- Assignee: TESLA, INC.
- Current Assignee: TESLA, INC.
- Current Assignee Address: 13101 Harold Green Road
- Agency: FULLER, Michael L.
- Priority: US63/158,201 2021-03-08
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/36 ; H01L23/60 ; H01L25/065 ; H01L25/16
Abstract:
The present disclosure relates to processing systems and more specifically to integrated circuit (IC) packages designed to reduce the effects of electrostatic discharge and/or electromagnetic interference during integrated circuit manufacture and/or use. The IC assembly may include a wafer positioned between a cooling system and thermal dissipation structure. The cooling system and thermal dissipation structure include electrically conductive material at a ground potential such that the thermal systems act as electrical ground. The wafer may be electrically connected to the cooling system and thermal dissipation structure to reduce static charge accumulation during the assembly process. The cooling system and thermal dissipation structure may further provide radio frequency (RF) shielding to reduce electromagnetic interference during use of the IC assembly.
Information query
IPC分类: