Invention Application
- Patent Title: INCLUSION OF SPECIAL ROLLER TO AVOID CREASING, WRINKLING AND DISTORTION OF FLEXIBLE SUBSTRATE IN ROLL TO ROLL PROCESS
-
Application No.: PCT/US2022/026655Application Date: 2022-04-28
-
Publication No.: WO2022245513A1Publication Date: 2022-11-24
- Inventor: KUNDU, Sambhu , RAMACHANDRAPPA, PrasannaKalleshwara, Buddappa , HERLE, Subramanya, P. , SIVARAMAKRISHNAN, Visweswaren
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 Bowers Avenue
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 Bowers Avenue
- Agency: PATTERSON, B., Todd et al.
- Priority: US63/189,786 2021-05-18
- Main IPC: C23C14/56
- IPC: C23C14/56 ; C23C14/50 ; C23C16/54
Abstract:
Embodiments of the present disclosure generally relate to flexible substrate fabrication. In particular, embodiments described herein relate to an apparatus and methods for flexible substrate fabrication using nip rollers to improve tension uniformity. In one embodiment, a roller assembly includes a primary roller for transporting a flexible substrate, wherein the primary roller has a first end and a second end, wherein the flexible substrate has a coating disposed hereon, and wherein one or more edge regions are not covered by the coating. The roller assembly further includes a first nip roller disposed at the first end of the primary roller that contacts a first edge region of the one or more edge regions, and a second nip roller disposed at the second end of the primary roller that contacts a second edge region of the one or more edge regions.
Information query
IPC分类: