Invention Application
- Patent Title: PREDICTION APPARATUS AND METHOD FOR OPTICAL SOURCE
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Application No.: PCT/US2022/032335Application Date: 2022-06-06
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Publication No.: WO2023287519A1Publication Date: 2023-01-19
- Inventor: BURDT, Russell, Allen , SHIN, Jung, Yoon
- Applicant: CYMER, LLC
- Applicant Address: 17075 Thornmint Court
- Assignee: CYMER, LLC
- Current Assignee: CYMER, LLC
- Current Assignee Address: 17075 Thornmint Court
- Agency: MARCELLI, Mark
- Priority: US63/221,166 2021-07-13
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
A prediction apparatus is in communication with an optical source configured to produce a pulsed light beam for use by a photolithography exposure apparatus. The prediction apparatus includes: a photolithography module in communication with the photolithography exposure apparatus and configured to receive an identifier, the received identifier lacking data relating to an actual firing pattern defining properties of the pulsed light beam; and an optical source module in communication with the optical source, the optical source module configured to provide a forecast firing pattern to the optical source. The forecast firing pattern is associated with and determined from the received identifier, and forecasts one or more properties of the actual firing pattern.
Information query
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