摘要:
The inorganic particle according to the present invention is composed of aggregation of crystalline and amorphous small particles and has a spherical and smooth surface. The spherical appearance, low crystallinity and narrow particle size distribution of inorganic particle are more advantageous in reducing scratch defects in the CMP process. In addition, since the small particles on the surface of the inorganic particle provide more active sites, the inorganic particle has an excellent removal rate, so it is advantageous as a next-generation CMP abrasive.
摘要:
Inorganic particles comprised in an aqueous dispersion according to the present invention consist of agglomerates of crystalline and amorphous microparticles, and exhibit spherical and smooth surfaces. The spherical appearance, low crystallinity, and narrow particle size distribution of the inorganic particles are further advantageous in reducing scratch defects in a CMP process. In addition, since the microparticles on the inorganic particle surfaces provide more active sites and thus the removal rate is high, the inorganic particles may be advantageous as next-generation CMP polishing materials. In addition, the aqueous dispersion according to the present invention further comprises an amino acid, and the amino acid may be adsorbed on a surface of a silicon oxide wafer to strengthen electrostatic attraction between the silicon oxide wafer and the inorganic particles, resulting in an effect of further improving the removal rate.
摘要:
A device and method for forming NO-containing gas flow to treat a biological object is disclosed. The device may include an anode, a cathode, an interelectrode area between the cathode and the anode, an NO-containing gas flow outlet channel leading from the interelectrode area to a nozzle for directing and releasing the NO-containing gas flow from the device and a mechanism to adjust a relative position between the anode and the cathode to produce varying concentrations of NO. In addition, the device may include one or more features for interconnecting the various components to ensure proper and consistent assembly of the device.
摘要:
A device for generating and delivering Nitric Oxide (NO) to a treatment site includes a main unit, an applicator, a connector hose, and a mobile stand. The main unit provides power and a gas to the applicator via the connector hose. The applicator includes a plasma generator for generating NO in a plasma state. The main unit including a user interface to enable a user to control at least one operational aspect of the device. The applicator includes a pistol grip handle, a trigger for actuating the plasma generator, a hose connection for coupling to the connector hose, and a cowl portion for spacing a tip of the plasma generator at a predetermined distance from a treatment site. Sensors are provided with the applicator for sending feedback and monitoring application site temperature, proximity to the application, applicator motion and the like.
摘要:
Methods for administering nitric oxide (NO) in a plasma state to a treatment site are disclosed. A discrete stream of matter is placed in a plasma state, in which the stream has, as part of its content, a desired concentration of NO. The discrete stream of matter is directed at a site of action to achieve a therapeutic result.
摘要:
A method for disinfecting clothes, shoes or equipment using nitric oxide is provided. The method comprises creating a discrete stream of matter that includes nitric oxide (NO) in a concentration from about 5 ppm to 3500 ppm, and directing the discrete stream of matter at a surface to disinfect the surface.
摘要:
A device for generating and delivering Nitric Oxide (NO) to a treatment site includes a main unit, an applicator, a connector hose, and a mobile stand. The main unit provides power and a gas to the applicator via the connector hose. The applicator includes a plasma generator for generating NO in a plasma state. The main unit including a user interface to enable a user to control at least one operational aspect of the device. The applicator includes a pistol grip handle, a trigger for actuating the plasma generator, a hose connection for coupling to the connector hose, and a cowl portion for spacing a tip of the plasma generator at a predetermined distance from a treatment site. Sensors are provided with the applicator for sending feedback and monitoring application site temperature, proximity to the application, applicator motion and the like.