公开(公告)号：EP1325386A4

公开(公告)日：2006-04-26

申请号：EP01973468

申请日：2001-09-26

申请人： CORNING INC

发明人： ACKERMAN BRADFORD G ,  BOWDEN BRADLEY F ,  DAVIS CLAUDE L JR ,  HRDINA KENNETH E

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  G03B27/58 ,  G03B27/42

CPC分类号： G03F7/70716 ,  G03F7/70216 ,  G03F7/708

摘要： A lithographic stage includes a platen (31) having a top face and a bottom face and a holder (32) for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.