公开(公告)号：EP1224047A4

公开(公告)日：2004-11-17

申请号：EP00937499

申请日：2000-02-17

申请人： CORNING INC

发明人： HRDINA KENNETH E ,  KAR GITIMOY ,  WIGHT JOHN F ,  YU CHUNZHE C

IPC分类号： B28B3/20 ,  B28B11/00 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B32/00 ,  C03B37/012 ,  G02B6/02 ,  B23B1/00

CPC分类号： G02B6/02347 ,  B28B3/269 ,  B28B11/003 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/42 ,  G02B6/02361 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/236 ,  Y10T428/24149

摘要： The present invention describes an extrusion process for manufacturing a titanium-containing silicate glass honeycomb structure (100), having a variety of shapes and sizes depending on its ultimate application. The titanium-containing glass honeycomb has a very low coefficient of thermal expansion (CTE) and the CTE can be varied by adjusting the titanium level to match the CTE of members that are bonded to the honeycomb. Furthermore, the inventive honeycomb structure is lightweight, yet able to advantageously used as a light-weight support for such objects as mirrors. Especially extraterrestrial environments where temperature extremes are present. These honeycombs can be used singularly or in aggregates to provide such support. Embodiments are described wherein the mass of the honeycomb is further reduced by removing select portions of the honeycomb without deleteriously impacting its ability for load bearing.

公开(公告)号：EP1218796A4

公开(公告)日：2006-08-23

申请号：EP00945368

申请日：2000-07-13

申请人： CORNING INC

发明人： DAVIS CLAUDE L ,  HRDINA KENNETH E ,  SABIA ROBERT

IPC分类号： G03F7/20 ,  C23C14/02 ,  C23C28/00 ,  G02B5/08 ,  G03F1/00 ,  G03F1/24 ,  G03F1/60 ,  G21K1/06 ,  G21K5/00 ,  H01L21/027

CPC分类号： G21K1/062 ,  B82Y10/00 ,  B82Y40/00 ,  G02B17/06 ,  G03F1/24 ,  G03F1/60 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70283 ,  G03F7/70891 ,  G03F7/70958 ,  Y10S438/947 ,  Y10S438/974

摘要： The present invention relates to reflective masks and their use for reflecting extreme ultraviolet soft x-ray photons to enable the use of extreme ultraviolet soft x-ray radiation projection lithographic methods and systems for producing integrated circuits and forming patterns with extremely small feature dimensions. The projection lithographic method includes providing an illumination sub-system for producing and directing an extreme ultraviolet soft x-ray radiation μ from an extreme ultraviolet soft x-ray source; providing a mask sub-system illuminated by the extreme ultraviolet soft x-ray radiation μ produced by the illumination sub-system and providing the mask sub-system includes providing a patterned reflective mask for forming a projected mask pattern when illuminated by radiation μ. Providing the patterned reflective mask includes providing a Ti doped high purity SiO2 glass wafer with a patterned absorbing overlay overlaying the reflective multilayer coated Ti doped high purity SiO2 glass defect free wafer surface that has an Ra roughness ≤0.15 nm. The method includes providing a projection sub-system and a print media subject wafer which has a radiation sensitive wafer surface wherein the projection sub-system projects the projected mask pattern from the patterned reflective mask onto the radiation sensitive wafer surface.

公开(公告)号：EP1325386A4

公开(公告)日：2006-04-26

申请号：EP01973468

申请日：2001-09-26

申请人： CORNING INC

发明人： ACKERMAN BRADFORD G ,  BOWDEN BRADLEY F ,  DAVIS CLAUDE L JR ,  HRDINA KENNETH E

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  G03B27/58 ,  G03B27/42

CPC分类号： G03F7/70716 ,  G03F7/70216 ,  G03F7/708

摘要： A lithographic stage includes a platen (31) having a top face and a bottom face and a holder (32) for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.

公开(公告)号：EP1390309A4

公开(公告)日：2004-12-08

申请号：EP02723639

申请日：2002-03-25

申请人： CORNING INC

发明人： ACKERMAN BRADFORD G ,  HRDINA KENNETH E ,  MOORE LISA A ,  RUSSO NIKKI J ,  YU CHUNZHE C

IPC分类号： G03F1/16 ,  C03B8/04 ,  C03B19/14 ,  C03C3/06 ,  C03C3/076 ,  G02B1/00 ,  G03F7/20 ,  H01L21/027 ,  C03B37/014

CPC分类号： C03C4/0085 ,  C03B19/1415 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/62 ,  C03B2207/70 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/40 ,  Y02P40/57

摘要： A titania precursor (18) and a silica precursor (6) are mixed in a manifold (14) and are fed to a burner (28) to create soot (40) which is deposited on a deposition surface (34) which is rotated and elevated. The end product is useful for Extreme UV lithography.

摘要翻译： 一种用于制造熔凝石英玻璃含二氧化钛的方法包括二氧化硅和二氧化钛的合成颗粒，通过连续沉积在沉积表面上的颗粒和二氧化钛前体的二氧化硅前体的混合物输送到燃烧器，生长的多孔预成型件，同时旋转和平移 相对沉积表面到燃烧器，并且巩固多孔预成致密的玻璃。

公开(公告)号：EP2217539A4

公开(公告)日：2015-07-01

申请号：EP08854815

申请日：2008-11-19

申请人： CORNING INC

发明人： HRDINA KENNETH E ,  SABIA ROBERT

IPC分类号： C03C3/097 ,  C03B19/14 ,  C03C3/06

CPC分类号： C03C3/06 ,  C03B19/1407 ,  C03B19/143 ,  C03B19/1484 ,  C03B2201/42 ,  C03C2201/42 ,  C03C2203/40

公开(公告)号：EP1214718A4

公开(公告)日：2006-08-23

申请号：EP00948609

申请日：2000-07-10

申请人： CORNING INC

发明人： DAVIS CLAUDE L JR ,  HRDINA KENNETH E

IPC分类号： G03F7/20 ,  C03B8/04 ,  C03B20/00 ,  C03C17/36 ,  C23C14/02 ,  C23C28/00 ,  G02B5/08 ,  G02B5/10 ,  G02B5/26 ,  G02B5/28 ,  G02B17/06 ,  G03F1/00 ,  G03F1/24 ,  G03F1/60 ,  G21K1/06 ,  G21K5/00 ,  G21K5/02 ,  H01L21/027

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  C03B19/1415 ,  C03B2201/07 ,  C03B2201/42 ,  G02B5/0891 ,  G02B17/0615 ,  G02B17/0636 ,  G03F1/24 ,  G03F1/60 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70283 ,  G03F7/70891 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

摘要： The projection lithographic method for producing integrated circuits and forming patterns with extremely small feature dimensions includes an illumination sub-system ( 36 ) for producing and directing an extreme ultraviolet soft x-ray radiation lambda from an extreme ultraviolet soft x-ray source ( 38 ); a mask stage ( 22 ) illuminated by the extreme ultraviolet soft x-ray radiation lambda produced by illumination stage and the mask stage ( 22 ) includes a pattern when illuminated by radiation lambda. A protection sub-system includes reflective multilayer coated Ti doped high purity SiO2 glass defect free surface ( 32 ) and printed media subject wafer which has a radiation sensitive surface.

公开(公告)号：EP1177092A4

公开(公告)日：2004-11-17

申请号：EP00914628

申请日：2000-02-17

申请人： CORNING INC

发明人： HRDINA KENNETH E ,  KAR GITIMOY ,  WIGHT JOHN F JR ,  YU CHUNZHE C

IPC分类号： B01D39/20 ,  B01D63/06 ,  B01D71/02 ,  B01D71/04 ,  B28B3/20 ,  B28B3/26 ,  C02F1/32 ,  C03B19/06 ,  C03B20/00 ,  C03B23/047 ,  C03B23/06 ,  C03B23/09 ,  C03B32/00 ,  C03B37/012 ,  C03C3/06 ,  C03C3/097 ,  C04B35/00 ,  C04B35/16 ,  G02B6/02 ,  B23B1/00 ,  B28B11/00

CPC分类号： G02B6/02347 ,  B01D63/066 ,  B01D71/027 ,  B01D71/04 ,  C02F1/32 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/14 ,  C03B2203/42 ,  G02B6/02357 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/24149 ,  Y10T428/24165

摘要： The present invention describes a glass honeycomb structure (100) having a variety of shapes and sizes depending on its ultimate application. Unlike prior art honeycomb structures made from ceramics, the inventive glass honeycomb can be readily bent and/or redrawn. Furthermore, the inventive honeycomb structure is light-weight, yet able to support heavy loads on its end faces (10a, 10b). Therefore, the inventive honeycomb can be used as a light-weight support for such objects as mirrors. Other useful properties of the extruded glass honeycomb are its high softening temperature, its transparency to ultraviolet and visible light, and its ability to be redrawn. Embodiments that rely upon one or more of these properties include: a bio-reactor, a membrane reactor, a capillary flow controller, a high efficiency filtration system, in-situ water treatment, high temperature dielectric material, and photonic band gap material.

公开(公告)号：EP1156988A4

公开(公告)日：2004-11-17

申请号：EP00914622

申请日：2000-02-17

申请人： CORNING INC

发明人： HRDINA KENNETH E ,  KAR GITIMOY ,  WIGHT JOHN F JR ,  YU CHUNZHE C

IPC分类号： B01D39/20 ,  B01D63/06 ,  B01D71/02 ,  B01D71/04 ,  B28B3/20 ,  B28B3/26 ,  C02F1/32 ,  C03B19/06 ,  C03B20/00 ,  C03B23/047 ,  C03B23/06 ,  C03B23/09 ,  C03B32/00 ,  C03B37/012 ,  C03C3/06 ,  C03C3/097 ,  C04B35/00 ,  C04B35/16 ,  G02B6/02 ,  B23B1/00 ,  B28B11/00

CPC分类号： G02B6/02347 ,  B01D63/066 ,  B01D71/027 ,  B01D71/04 ,  C02F1/32 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/14 ,  C03B2203/42 ,  G02B6/02357 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/24149 ,  Y10T428/24165

摘要： The present invention describes an extrusion process for manufacturing a glass honeycomb structure (100) having a variety of shapes and sizes depending on its ultimate application. Unlike prior art honeycomb structures made from ceramics, the inventive glass honeycomb (100) can be readily viscously bent and/or redrawn. Furthermore, the inventive honeycomb structure (100) is light-weight, yet able to support heavy loads on its end faces (10a, 10b). Therefore, the inventive honeycomb (100) can be used as a light-weight support for such objects as mirrors. These honeycombs (100) can be used singularly or in aggregates to provide such support. Embodiments are described wherein the mass of the honeycomb (100) is further reduced by removing select portions of the honeycomb without deleteriously impacting its ability for load bearing.