MACHINE FOR THE PLASMA TREATMENT OF MATERIALS WITH NON- HOMOGENEOUS AND/OR DISCONTINUOUS THICKNESS

    公开(公告)号:EP3369106A1

    公开(公告)日:2018-09-05

    申请号:EP15823205.8

    申请日:2015-10-27

    申请人: Grinp S.R.L.

    发明人: PARISI, Francesco

    IPC分类号: H01J37/32

    CPC分类号: H01J37/32752 H01J37/32568

    摘要: The invention relates to a machine (1) for the plasma treatment of materials, which comprises a first (2) and a second (3) electrode which extend on two parallel planes, one opposite the other. The machine comprises moreover gas supply means (5) for supplying a gas (6) between the first and the second electrode (2) and electrical means apt to generate an electric field between the first (2) and the second (3) electrode in such a way as to trigger the breakdown of the gas (6) and generate in this way a plasma in the region of space traversed by the lines of force of the electric field. According to the invention, the first (2) and the second (3) electrode comprise conductive elements of one or more mobile mats (2, 3) in the region of space where the plasma is formed. At least one of said one or more mobile mats is used to transport a substrate of material to be treated.