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11 条记录 (耗时 0.016 秒)

    Liquefied gas supply system
    1.
    发明公开
    Liquefied gas supply system 失效
    VersorgungssystemfürFlüssiggas

    公开(公告)号：EP0740103A2

    公开(公告)日：1996-10-30

    申请号：EP96106640.4

    申请日：1996-04-26

    申请人： EBARA CORPORATION

    发明人： Matsumura, Masao ,  Takeuchi, Takao ,  Kishikawa, Tadahiko

    IPC分类号： F17C9/02

    CPC分类号： F17C9/02 ,  F17C2201/0109 ,  F17C2201/0119 ,  F17C2201/032 ,  F17C2201/052 ,  F17C2205/0326 ,  F17C2205/0335 ,  F17C2221/033 ,  F17C2221/035 ,  F17C2223/0153 ,  F17C2223/0161 ,  F17C2223/033 ,  F17C2225/0123 ,  F17C2227/0135 ,  F17C2227/0178 ,  F17C2227/0185 ,  F17C2227/0393 ,  F17C2250/032 ,  F17C2250/0636 ,  F17C2265/031 ,  F17C2265/037 ,  F17C2265/038 ,  F17C2265/05 ,  F17C2270/0147

    摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the back-pressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

    摘要翻译： 独立液化气供给系统具有用于储存液化气的罐，用于从罐输送液化气的主泵，用于对从主泵输送的液化气加压的二次泵，用于蒸发液化气的蒸发器 从二次泵排出到蒸发气体中，用于利用由蒸发器产生的汽化气体来驱动次级泵的膨胀器，以及连接到膨胀机出口的背压管线。 旁通管连接在主泵和蒸发器之间，与副泵旁通，用于将液化气体从初级泵提供给蒸发器。 连接线连接在背压管线和基本上大气压力线之间，该连接管线具有第一流量调节阀，用于调节气体从背压管线到基本大气压力管线的流速。 旁通管线以与膨胀机旁通的方式连接在蒸发器和背压管线之间，旁通管路具有第二流量调节机构，用于调节气化气体从蒸发器到背压管线的流速。 为了启动次级泵，液化气从初级泵通过旁通管输送到蒸发器，蒸发器产生供应到膨胀机的蒸发气体。

    Storage vessel
    3.
    发明公开
    Storage vessel 失效
    Speicherbehälter。

    公开(公告)号：EP0435338A2

    公开(公告)日：1991-07-03

    申请号：EP90125732.9

    申请日：1990-12-28

    申请人： EBARA CORPORATION

    发明人： Matsumura, Masao

    IPC分类号： H01L21/00 ,  B65G1/12

    CPC分类号： H01L21/67769

    摘要： A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receivers (6) fixed to a shaft (8) for horizontal rotation. The receivers support carriers (7) having the articles therein. Both thrust and radial bearings (2-4) supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor (5) with a rotor (19) fixed to the shaft and a stator (20) facing the rotor. The vessel may have a vacuum or be charged with inert gas.

    摘要翻译： 保持用于存储诸如半导体晶片的物品的清洁环境的存储容器包括固定到用于水平旋转的轴的多个接收器。 接收机支持其中具有物品的载体。 支撑轴的推力轴承和径向轴承都是非接触式的。 轴由电动机驱动，转子固定在轴上，定子面向转子。 容器可以具有真空或装有惰性气体。

    Centrifugal pump having magnetic bearing
    6.
    发明公开
    Centrifugal pump having magnetic bearing 失效
    Kreiselpumpe mit磁性Lager。

    公开(公告)号：EP0355796A2

    公开(公告)日：1990-02-28

    申请号：EP89115472.6

    申请日：1989-08-22

    申请人： EBARA CORPORATION

    发明人： Katsuta, Seigo ,  Kanemitsu, Yoichi ,  Matsumura, Masao

    IPC分类号： F04D29/04

    CPC分类号： F04D29/048 ,  F04D29/049 ,  F16C32/0476 ,  F16C2360/42 ,  F16C2360/44 ,  F16C2360/45

    摘要： A single or multi-stage centrifugal pump which is designed so that the thrust generated by an impeller (2) is balanced by the operation of a balancing disc device (3) is disclosed. In this pump, a magnetic bearing is employed as an axial thrust bearing (20), the distance between the surface of a balancing disc (3) and an axial displacement detecting surface (12) which moves together with the pump shaft (1), and the distance between that surface of a balancing disc seat (4) as being a fixed-side member which faces said balancing disc surface, and that surface of a displacement sensor (14) as being another fixed-side member which faces said axial displacement detecting surface (12), are made equal to each other, or the latter distance is made slightly larger than the former distance, and the neutral position of said magnetic thrust bearing (20) is made to be substantially coincident with the axial position of the rotator of said pump that is deter­mined by said balancing disc device (3) during running of said pump. By these arrangements, the position of the stator is determined by the balancing disc device (3) during normal opera­tion of the pump, whereas the position is determined by the magnetic thrust bearing (20) when the pump is at rest or in a transient running state.

    摘要翻译： 公开了一种设计成使得由叶轮（2）产生的推力通过平衡盘装置（3）的操作来平衡的单级或多级离心泵。 在该泵中，使用磁轴承作为轴向推力轴承（20），平衡盘（3）的表面与与泵轴（1）一起移动的轴向位移检测表面（12）之间的距离， 以及作为面向所述平衡盘表面的固定侧构件的平衡盘座（4）的表面之间的距离以及作为面向所述轴向位移的另一固定侧构件的位移传感器（14）的表面 检测表面（12）彼此相等，或者使后一距离略大于前一距离，并且使所述磁止推轴承（20）的中立位置基本上与所述检测表面（12）的轴向位置一致， 在所述泵运行期间由所述平衡盘装置（3）确定的所述泵的旋转器。 通过这些布置，在泵的正常操作期间，定子的位置由平衡盘装置（3）确定，而当泵处于静止状态或暂时运行时，该位置由磁性推力轴承（20）确定 州。

    Turboexpander pump unit
    9.
    发明公开
    Turboexpander pump unit 失效
    Pumpeneinheit mit Entspenungsturbine。

    公开(公告)号：EP0669466A1

    公开(公告)日：1995-08-30

    申请号：EP95102437.1

    申请日：1995-02-21

    申请人： EBARA CORPORATION

    发明人： Matsumura, Masao ,  Takeuchi, Takao, c/o Ebara Corp. ,  Katsuta, Seigo, c/o Ebara Research Co., Ltd.

    IPC分类号： F04D13/04 ,  F01K25/10 ,  F04D1/06

    CPC分类号： F01K25/10 ,  F04D1/06 ,  F04D13/04

    摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump (1) connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger (42) for heating and converting the liquid fluid pressurized by the pump (1) into a high-pressure gas, and an expander turbine (3) connected to an opposite end of the shaft (2) and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger (42) is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump (1) having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

    摘要翻译： 涡轮膨胀机泵单元具有垂直轴或水平轴，连接到轴的端部的用于将液体流体加压至高于预定输送压力的压力的泵（1），用于加热和转换液体的热交换器（42） 由泵（1）加压到高压气体中的流体和连接到轴（2）的相对端的膨胀涡轮机（3），并且可通过当来自热源的高压气体产生的热能降低而致动 交换器（42）降低到预定的输送压力，用于将液体流体在预定压力下连续输送到外部设备。 泵（1）具有至少两个出口，用于在各自的不同压力下排出液体流体。 两个出口之一连接到热交换器，另一个连接到液体输送管线。

    Storage vessel
    10.
    发明公开
    Storage vessel 失效
    存储船

    公开(公告)号：EP0435338A3

    公开(公告)日：1992-06-17

    申请号：EP90125732.9

    申请日：1990-12-28

    申请人： EBARA CORPORATION

    发明人： Matsumura, Masao

    IPC分类号： H01L21/00 ,  B65G1/12

    CPC分类号： H01L21/67769

    摘要： A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receivers (6) fixed to a shaft (8) for horizontal rotation. The receivers support carriers (7) having the articles therein. Both thrust and radial bearings (2-4) supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor (5) with a rotor (19) fixed to the shaft and a stator (20) facing the rotor. The vessel may have a vacuum or be charged with inert gas.