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公开(公告)号：EP0698576B1
公开(公告)日：2003-04-23
申请号：EP95113336.2
申请日：1995-08-24
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko
IPC分类号： C01B13/11
CPC分类号： C01B13/11
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公开(公告)号：EP0703187A3
公开(公告)日：1999-11-10
申请号：EP95113254.7
申请日：1995-08-23
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko , Nakano, Yutaka
CPC分类号： C23C16/448 , C01B13/10 , C01B13/11 , C01B2201/60 , C23C8/12 , C23C16/402 , C23C16/4402
摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices. Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10 - 20 vol% of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.
摘要翻译： 臭氧发生器（10），它在高电压的应用中的进料气体供给到臭氧发生单元（11），并且通过在臭氧气体输送路径（由管（14）和（15）的），因为它已被输送到臭氧气体 在所述臭氧发生电解池（11）中产生在没有臭氧气体输送路径配有用于去除NOx，HF和SO x中的至少一个的特征在于（在附图中，所述装置是用于除去NO x）和没有臭氧气体 从臭氧发生电解池（11）通过所述传递去除装置，借此的NOx，SOx和HF所述臭氧气体中的至少一个之前被输送到随后的阶段被去除。 将产物臭氧不沾在所有铬化合物或不充分地污染，以使在高度集成的半导体器件的制造中的任何实际问题。 可替代地，臭氧发生器（10），其包括具有在入口（8），用于提供进料气体，高电压施加装置（35）和在出口（29）用于排出所述臭氧产生的臭氧发生电解池（11），和臭氧输送路径 （30）和（31），用于输送所产生的臭氧，其特征在于补充有10 DASS氧气（1） - 二氧化碳和/或一氧化碳的20体积％（2）被用作进料气体。 这样产生的臭氧是在铬化合物的水平显着较低，因此，可适用于形成金属氧化物，特别是，氧化硅使用。
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公开(公告)号：EP0703187B1
公开(公告)日：2006-06-14
申请号：EP95113254.7
申请日：1995-08-23
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko , Nakano, Yutaka
CPC分类号： C23C16/448 , C01B13/10 , C01B13/11 , C01B2201/60 , C23C8/12 , C23C16/402 , C23C16/4402
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公开(公告)号：EP0698576A3
公开(公告)日：1996-05-01
申请号：EP95113336.2
申请日：1995-08-24
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko
IPC分类号： C01B13/11
CPC分类号： C01B13/11
摘要： In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.
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公开(公告)号：EP0703187A2
公开(公告)日：1996-03-27
申请号：EP95113254.7
申请日：1995-08-23
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko , Nakano, Yutaka
CPC分类号： C23C16/448 , C01B13/10 , C01B13/11 , C01B2201/60 , C23C8/12 , C23C16/402 , C23C16/4402
摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.
Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10 - 20 vol% of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.-
公开(公告)号：EP0698576A2
公开(公告)日：1996-02-28
申请号：EP95113336.2
申请日：1995-08-24
发明人： Harada, Minoru , Shinjo, Ryoichi , Tsujimura, Manabu , Nakata, Rempei , Miyazaki, Kunihiro , Kaji, Naruhiko
IPC分类号： C01B13/11
CPC分类号： C01B13/11
摘要： In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.
摘要翻译： 在改进的臭氧发生器中，至少臭氧气体输送路径的位于臭氧发生池下游的要与臭氧气体接触的那些部分或者由至少一种选择的耐臭氧无Cr材料 从铝（Al），铝合金，特氟隆，氟化镍，镍合金，氧化硅系玻璃和高纯度氧化铝中选择。 臭氧发生器能够产生根本不被铬化合物污染的臭氧，或者其在制造高度集成的半导体器件时没有被充分污染而导致任何实际问题。
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公开(公告)号：EP0579060A1
公开(公告)日：1994-01-19
申请号：EP93110617.3
申请日：1993-07-02
申请人： EBARA CORPORATION
IPC分类号： C01B13/11
CPC分类号： C01B13/11 , C01B2201/22 , C01B2201/64 , C01B2201/66 , C01B2201/74
摘要： In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm² and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15°C, whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.
摘要翻译： 在使用纯度为99.99％以上的高纯度氧气的放电型臭氧发生器作为原料气体的情况下，放电器的放电空间内的气体的压力至少上升至比大气压高的水平 1.1kgf / cm 2和/或其中使用液体冷却排放器，并且冷却液体的温度设定为不低于15℃的水平，由此臭氧发生器能够在高臭氧水平下稳定地产生臭氧气体 而不会导致臭氧浓度随时间降低。
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公开(公告)号：EP1167287A1
公开(公告)日：2002-01-02
申请号：EP01115970.4
申请日：2001-06-29
申请人： EBARA CORPORATION
IPC分类号： C01B13/11
CPC分类号： C01B13/11 , C01B2201/12 , C01B2201/22
摘要： An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, a dielectric provided between the opposing electrodes, and a gas flow passage for effecting flow of a material gas defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.
摘要翻译： 臭氧发生器包括一对间隔开的相对电极，将该对电极连接到高压交流电源的导电构件，以在电极之间产生放电，设置在相对电极之间的电介质和气流 用于实现由电极表面限定的材料气体流动的通道。 该对电极的至少一个表面具有多个平行的凹槽。 材料气体在横向于槽的方向上在多个槽和电介质之间的空间中流动。
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公开(公告)号：EP0567114A3
公开(公告)日：1994-09-28
申请号：EP93106543.7
申请日：1993-04-22
申请人： EBARA CORPORATION
发明人： Kamiya, Ichiro , Shinjo, Ryoichi , Murakami, Takeshi, Ebaraseisakusho Hiyoshiryo , Nishioka, Yukiko , Harada, Minoru
IPC分类号： C01B13/11
CPC分类号： C01B13/11 , C01B2201/34 , Y10S422/907
摘要： A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO₂) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.
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公开(公告)号：EP1167287B1
公开(公告)日：2004-12-08
申请号：EP01115970.4
申请日：2001-06-29
申请人： EBARA CORPORATION
IPC分类号： C01B13/11
CPC分类号： C01B13/11 , C01B2201/12 , C01B2201/22
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