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18 条记录 (耗时 0.01 秒)

    Ozonizer
    2.
    发明公开
    Ozonizer 失效
    臭氧发生器

    公开(公告)号：EP0579060A1

    公开(公告)日：1994-01-19

    申请号：EP93110617.3

    申请日：1993-07-02

    申请人： EBARA CORPORATION

    发明人： Shinjo, Ryoichi ,  Kamiya, Ichiro ,  Harada, Minoru ,  Nishioka, Yukiko

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11 ,  C01B2201/22 ,  C01B2201/64 ,  C01B2201/66 ,  C01B2201/74

    摘要： In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm² and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15°C, whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.

    摘要翻译： 在使用纯度为99.99％以上的高纯度氧气的放电型臭氧发生器作为原料气体的情况下，放电器的放电空间内的气体的压力至少上升至比大气压高的水平 1.1kgf / cm 2和/或其中使用液体冷却排放器，并且冷却液体的温度设定为不低于15℃的水平，由此臭氧发生器能够在高臭氧水平下稳定地产生臭氧气体 而不会导致臭氧浓度随时间降低。

    Ozone generator
    3.
    发明公开
    Ozone generator 有权
    Ozonerzeuger

    公开(公告)号：EP1167287A1

    公开(公告)日：2002-01-02

    申请号：EP01115970.4

    申请日：2001-06-29

    申请人： EBARA CORPORATION

    发明人： Shinjo, Ryoichi ,  Harada, Minoru ,  Nishioka, Yukiko

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11 ,  C01B2201/12 ,  C01B2201/22

    摘要： An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, a dielectric provided between the opposing electrodes, and a gas flow passage for effecting flow of a material gas defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.

    摘要翻译： 臭氧发生器包括一对间隔开的相对电极，将该对电极连接到高压交流电源的导电构件，以在电极之间产生放电，设置在相对电极之间的电介质和气流 用于实现由电极表面限定的材料气体流动的通道。 该对电极的至少一个表面具有多个平行的凹槽。 材料气体在横向于槽的方向上在多个槽和电介质之间的空间中流动。

    Discharge reactor
    4.
    发明公开
    Discharge reactor 失效
    放电反应器

    公开(公告)号：EP0567114A3

    公开(公告)日：1994-09-28

    申请号：EP93106543.7

    申请日：1993-04-22

    申请人： EBARA CORPORATION

    发明人： Kamiya, Ichiro ,  Shinjo, Ryoichi ,  Murakami, Takeshi, Ebaraseisakusho Hiyoshiryo ,  Nishioka, Yukiko ,  Harada, Minoru

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11 ,  C01B2201/34 ,  Y10S422/907

    摘要： A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO₂) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.

    Method and apparatus for generating ozone and methods of its use
    6.
    发明公开
    Method and apparatus for generating ozone and methods of its use 失效
    对于臭氧的生成和使用该装置的方法的方法和装置

    公开(公告)号：EP0703187A3

    公开(公告)日：1999-11-10

    申请号：EP95113254.7

    申请日：1995-08-23

    申请人： EBARA CORPORATION ,  KABUSHIKI KAISHA TOSHIBA

    发明人： Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu ,  Nakata, Rempei ,  Miyazaki, Kunihiro ,  Kaji, Naruhiko ,  Nakano, Yutaka

    IPC分类号： C01B13/11 ,  C01B13/10

    CPC分类号： C23C16/448 ,  C01B13/10 ,  C01B13/11 ,  C01B2201/60 ,  C23C8/12 ,  C23C16/402 ,  C23C16/4402

    摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices. Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10 - 20 vol% of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

    摘要翻译： 臭氧发生器（10），它在高电压的应用中的进料气体供给到臭氧发生单元（11），并且通过在臭氧气体输送路径（由管（14）和（15）的），因为它已被输送到臭氧气体 在所述臭氧发生电解池（11）中产生在没有臭氧气体输送路径配有用于去除NOx，HF和SO x中的至少一个的特征在于（在附图中，所述装置是用于除去NO x）和没有臭氧气体 从臭氧发生电解池（11）通过所述传递去除装置，借此的NOx，SOx和HF所述臭氧气体中的至少一个之前被输送到随后的阶段被去除。 将产物臭氧不沾在所有铬化合物或不充分地污染，以使在高度集成的半导体器件的制造中的任何实际问题。 可替代地，臭氧发生器（10），其包括具有在入口（8），用于提供进料气体，高电压施加装置（35）和在出口（29）用于排出所述臭氧产生的臭氧发生电解池（11），和臭氧输送路径 （30）和（31），用于输送所产生的臭氧，其特征在于补充有10 DASS氧气（1） - 二氧化碳和/或一氧化碳的20体积％（2）被用作进料气体。 这样产生的臭氧是在铬化合物的水平显着较低，因此，可适用于形成金属氧化物，特别是，氧化硅使用。

    Ozone generating apparatus
    7.
    发明公开
    Ozone generating apparatus 失效
    Vorrichtung zur Erzeugung von Ozon

    公开(公告)号：EP0738684A1

    公开(公告)日：1996-10-23

    申请号：EP96105965.6

    申请日：1996-04-16

    申请人： EBARA CORPORATION

    发明人： Kaji, Naruhiko ,  Nakano, Yutaka ,  Nakata, Rempei ,  Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu

    IPC分类号： C01B13/11 ,  C01B13/10

    CPC分类号： C01B13/11 ,  C01B13/10

    摘要： An ozone generating apparatus for producing highly pure ozone gas which can be used in the semiconductor manufacturing process. The ozone generating apparatus comprises a high voltage source, an ozone generating cell which generates ozone gas by supplying a material gas while applying a high voltage from the high voltage source, and a passage for delivering the generated ozone gas from the ozone generating cell to a desired location. The passage comprises a material which has a passivation film formed by a passivation treatment in a dry process. The oxide passivation film comprises chromium oxide film, iron oxide film or a composite film of chromium oxide and iron oxide.

    摘要翻译： 一种用于生产高纯度臭氧气体的臭氧发生装置，其可用于半导体制造过程。 臭氧发生装置包括高电压源，臭氧发生电池，其通过在施加来自高电压源的高电压的同时供给材料气体而产生臭氧气体，以及用于将产生的臭氧气体从臭氧发生电池输送到 理想位置。 该通道包括具有通过在干法中钝化处理形成的钝化膜的材料。 氧化物钝化膜包括氧化铬膜，氧化铁膜或氧化铬和氧化铁的复合膜。

    Discharge reactor
    8.
    发明公开
    Discharge reactor 失效
    Entladungsreaktor。

    公开(公告)号：EP0567114A2

    公开(公告)日：1993-10-27

    申请号：EP93106543.7

    申请日：1993-04-22

    申请人： EBARA CORPORATION

    发明人： Kamiya, Ichiro ,  Shinjo, Ryoichi ,  Murakami, Takeshi, Ebaraseisakusho Hiyoshiryo ,  Nishioka, Yukiko ,  Harada, Minoru

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11 ,  C01B2201/34 ,  Y10S422/907

    摘要： A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO₂) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.

    摘要翻译： 一种放电反应器，其在电介质和高电压电极和/或接地电极之间产生静电放电和/或蠕变放电，所述电介质位于高电压电极和接地电极之间，并且在放电空间1中通过时产生干净的臭氧 所述放电空间1或者其被保持在所述放电空间1内，该放电反应器的特征在于电介质由高度纯化的石英玻璃（SiO 2）或单晶蓝宝石制成，其是高度纯化的结晶的氧化铝或高纯度的结晶的氧化铝， 纯度高的氧化铝陶瓷，其是高纯度氧化铝的烧制。 此外，为了获得更清洁和高浓度的臭氧，至少要放电的放电空间区域中的电极或电极由高纯度铝材料制成，并且至少放电空间的区域 进一步用阳极氧化膜进行曝光。