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公开(公告)号：EP4450819A1
公开(公告)日：2024-10-23
申请号：EP22907521.3
申请日：2022-12-15
发明人： FUKAMI, Hideo
摘要： A vacuum pump and a control device having a protective function which can prevent rotor destruction caused by heating without measuring a temperature of a rotor blade. A vacuum pump including: a rotor blade that sends a gas to an outlet port; a motor that rotates/drives the rotor blade; a rotational speed measuring means that measures a rotational speed of the rotor blade; and a current measuring means that measures a current flowing through the motor, in which a first region defined such that a current measured value measured flowing through the motor is equal to or larger than a current specified value and a rotational speed measured value of the rotor blade is equal to or larger than a rotational speed specified value, a second region defined such that the current measured value flowing through the motor is less than the current specified value or the rotational speed measured value of the rotor blade is less than the rotational speed specified value, a region determining means that determines to which region of the first region and the second region the rotational speed measured value measured by the rotational speed measuring means and the current measured value measured by the current measuring means belong, and a calculating means that calculates a risk degree of a failure of the vacuum pump with elapse of time on the basis of results of the determination by the region determining means are provided.
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公开(公告)号：EP3808985A1
公开(公告)日：2021-04-21
申请号：EP19820034.7
申请日：2019-06-03
发明人： FUKAMI, Hideo
IPC分类号： F04D19/04
摘要： The present invention provides a vacuum pump and a temperature control device that are capable of preventing, with a simple configuration, overheating and overcooling of a pump that are caused due to abnormality in a temperature sensor used to control a heater or a water-cooling solenoid valve that is provided to prevent the deposition of products. Problems such as overheating and overcooling of a heater can be avoided in a case where a temperature sensor system fails and consequently the measured temperature continues to be constant between the upper limit and the lower limit. TMS function controls the measured temperature of the temperature sensor to a target temperature. Thus, if an application such as a target to be heated or a heater capacity is identified, the same cycles of turning ON/OFF of the heater or the water-cooling solenoid valve are repeated, and the upper limit of the time in which the ON/OFF state is sustained continuously is determined. An allowed time considering a margin is provided for this upper limit, and the ON/OFF state is changed so that the ON state or the OFF state is not continuously sustained beyond the allowed time.
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公开(公告)号：EP4438904A1
公开(公告)日：2024-10-02
申请号：EP22898633.7
申请日：2022-11-24
发明人： HONMA, Ryutaro , KASAHARA, Kazuya , FUKAMI, Hideo
CPC分类号： F04D19/04 , F04D27/001 , F04D27/0292 , F04D19/042
摘要： A vacuum pump that allows for the identification of the noise immunities or the like of a master circuit and a slave circuit for controlling an operation of each of portions included in the vacuum pump, and a controller used for such a vacuum pump are proposed. The present invention includes a control means 200 configured to control an operation of each of portions included in a vacuum pump 100. The control means 200 includes a slave circuit 201, 202 connected to each of the portions to control the operation of each of the portions and a master circuit 204 connected to the slave circuit 201, 202 to control the slave circuit 201, 202. The master circuit 204 is configured to perform periodical communications with the slave circuit 201, 202 and obtain a history of communication states in the communications.
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公开(公告)号：EP4108929A1
公开(公告)日：2022-12-28
申请号：EP21756305.5
申请日：2021-02-10
发明人： FUKAMI, Hideo
IPC分类号： F04D19/04
摘要： A vacuum pump that allows for timely inspection and replacement of a temperature adjustment means, prevents unexpected stopping, and limits the maintenance cost, and a controller that controls the vacuum pump are proposed. The present invention relates to a vacuum pump for exhausting gas from an apparatus subjected to exhaustion. The vacuum pump includes: a temperature adjustment means for causing a predetermined area of the vacuum pump to have a predetermined temperature; an output control means configured to operate the temperature adjustment means; and an information output means configured to output information regarding ON/OFF of the temperature adjustment means obtained from the output control means.
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公开(公告)号：EP4036416A1
公开(公告)日：2022-08-03
申请号：EP20867291.5
申请日：2020-09-10
发明人： FUKAMI, Hideo , KASAHARA, Kazuya , OGAWA, Tomomasa
摘要： A vacuum pump and an accessory unit of the vacuum pump for which there is no need of adjustment with respect to an operation schedule on an apparatus side, and for which version upgrade of built-in software and a change in setting data can be performed easily even if a personal computer cannot be brought into a site, are provided.
In a built-in software and the like storage-portion of an optional device, new-version software and modules for updating software currently stored in a magnetic-bearing control portion, a motor driving/control portion, and a protection-function processing portion are stored. Moreover, new parameters for updating parameters such as a setting value, an alarm value and the like currently stored in setting parameter are also stored. An application program or a parameter read out of the built-in software and the like storage-portion is sent by a user-interface processing portion to a built-in software update processing portion, and various programs and data are updated by this built-in software update processing portion.-
公开(公告)号：EP3783227A1
公开(公告)日：2021-02-24
申请号：EP19788949.6
申请日：2019-03-20
IPC分类号： F04D19/04
摘要： The present invention can provide a vacuum pump capable of obtaining a rotation direction and correcting the rotation direction without adding a dedicated rotation direction sensor even in a state of low-speed rotation. The control device is capable of obtaining at least a first state in which a rotor shaft rotates at relatively high speed, and a second state in which the rotor shaft deviates within a gap between the rotor shaft and a protective bearing and rotates at relatively low speed while revolving, acquires output information of a radial displacement sensor, obtains a rotation direction of the rotor shaft in the second state on the basis of the output information, determines whether the rotation direction is normal or not, and when the rotation direction is not normal, stops the rotation and increases rotation speed to achieve a normal rotation direction.
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公开(公告)号：EP3677785A1
公开(公告)日：2020-07-08
申请号：EP18851537.3
申请日：2018-08-24
发明人： EZAWA, Yoshimasa , FUKAMI, Hideo , SATO, Kou
摘要： A vacuum pump and a controller are provided. The vacuum pump and the controller can perform accurate and stable control during a steady operation, are resistant to disturbance, and achieve a short pump stop time and size reduction. A position deviation calculated by a subtractor is input to the PIDs of three modes. The first PID is a PID controller for a high-bias mode, the second PID is a PID controller for a high-rigidity mode, and the third PID is a PID controller for a low-rigidity mode. The output signal of the third PID is extracted as a change of an indicator current for each clock of a PWM frequency and then the mean value of a change of an indicator current for several clocks is determined in a calculating unit. At this point, a switching control unit performs an operation on whether the mean value of the averaged change of the indicator current is larger than a preset redetermined value and then according to the result, an α value is outputted in the range of 0 to 1 from the switching control unit.
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