公开(公告)号：EP3677785A1

公开(公告)日：2020-07-08

申请号：EP18851537.3

申请日：2018-08-24

申请人： Edwards Japan Limited

发明人： EZAWA, Yoshimasa ,  FUKAMI, Hideo ,  SATO, Kou

IPC分类号： F04D19/04 ,  F16C32/04

摘要： A vacuum pump and a controller are provided. The vacuum pump and the controller can perform accurate and stable control during a steady operation, are resistant to disturbance, and achieve a short pump stop time and size reduction. A position deviation calculated by a subtractor is input to the PIDs of three modes. The first PID is a PID controller for a high-bias mode, the second PID is a PID controller for a high-rigidity mode, and the third PID is a PID controller for a low-rigidity mode. The output signal of the third PID is extracted as a change of an indicator current for each clock of a PWM frequency and then the mean value of a change of an indicator current for several clocks is determined in a calculating unit. At this point, a switching control unit performs an operation on whether the mean value of the averaged change of the indicator current is larger than a preset redetermined value and then according to the result, an α value is outputted in the range of 0 to 1 from the switching control unit.