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公开(公告)号:EP1851368B1
公开(公告)日:2012-08-08
申请号:EP06709605.7
申请日:2006-02-02
申请人: Kromek Limited
发明人: BASU, Arnab , ROBINSON, Max 1 Bishop's Court Low Road , CANTWELL, Ben 152 Highfield Rise , BRINKMAN, Andy
CPC分类号: C30B23/005 , C30B23/002 , C30B23/02 , C30B23/025 , C30B29/48 , C30B29/66 , Y10T117/10 , Y10T117/1004
摘要: The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.