Physical sensor, in particular semiconductive pressure sensor
    2.
    发明公开
    Physical sensor, in particular semiconductive pressure sensor 有权
    Halbleiterdruckwandler mit过滤器

    公开(公告)号:EP1096243A2

    公开(公告)日:2001-05-02

    申请号:EP00122976.4

    申请日:2000-10-23

    申请人: MOTOROLA, INC.

    IPC分类号: G01L9/06 G01L19/06

    摘要: A physical sensor component includes a housing (110) having a cavity (112), a pressure sensor device (120) mounted in the cavity of the housing, and a chemically selective and physically selective filter (153) overlying the cavity of the housing and separated from the pressure sensor device.

    摘要翻译: 物理传感器部件包括具有空腔(112)的壳体(110),安装在壳体的空腔中的压力传感器装置(120)以及覆盖在壳体的腔体上的化学选择性物理选择性过滤器(153) 与压力传感器装置分离。