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公开(公告)号：EP0645468B1
公开(公告)日：2001-11-28
申请号：EP94307036.7
申请日：1994-09-27
发明人： Fukutomi, Masao Nat. Research Inst. for Metals , Aoki, Shigeki Nat. Research Inst. for Metals , Komori, Kazunori Nat. Research Inst. for Metals , Asano, Toshihisa Nat. Research Inst. for Metals , Tanaka, Yoshiaki Nat. Research Inst. for Metals , Maeda, Hiroshi Nat. Research Inst. for Metals
CPC分类号： C23C14/345 , C23C14/083 , C23C14/225 , C23C14/34 , C23C14/50 , C30B23/002
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2.发明公开Crystal-oriented thin film manufacturing apparatus 失效Vorrichtung zur Herstellung eines kristallorientiertenDünnfilms。
公开(公告)号：EP0645468A1
公开(公告)日：1995-03-29
申请号：EP94307036.7
申请日：1994-09-27
发明人： Fukutomi, Masao Nat. Research Inst. for Metals , Aoki, Shigeki Nat. Research Inst. for Metals , Komori, Kazunori Nat. Research Inst. for Metals , Asano, Toshihisa Nat. Research Inst. for Metals , Tanaka, Yoshiaki Nat. Research Inst. for Metals , Maeda, Hiroshi Nat. Research Inst. for Metals
CPC分类号： C23C14/345 , C23C14/083 , C23C14/225 , C23C14/34 , C23C14/50 , C30B23/002
摘要： A substrate electrode (1) having a plurality of substrate holders (2) capable of causing a substrate to tilt by an arbitrary angle ϑ relative to the horizontal plane is provided. A plurality of auxiliary electrodes (3) are arranged substantially vertically below the substrate electrode and between the substrate electrode (1) and a target (4). The substrate electrode (1) and the auxiliary electrodes (3) are electrically insulated from the target (4). Bias voltage applied to the substrate electrode (1) and the auxiliary electrodes (3) causes the plasma boundary (5) between the cathode dark space and the negative glow to form a cathodic plasma space having a parabolic section, thus forming a crystal-oriented thin film on the substrate surface.
摘要翻译： 提供了具有能够使基板相对于水平面倾斜任意角度θ的多个基板保持件（2）的基板电极（1）。 多个辅助电极（3）基本上垂直地设置在基板电极下方以及基板电极（1）和目标（4）之间。 基板电极（1）和辅助电极（3）与靶（4）电绝缘。 施加到基板电极（1）和辅助电极（3）的偏压使阴极暗区和负辉光之间的等离子体边界（5）形成具有抛物面的阴极等离子体空间，从而形成晶体取向 薄膜在基材表面上。
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