SYSTEM AND METHOD FOR PURIFICATION OF SILANE USING LIQUID NITROGEN IN A POLYSILICON PRODUCTION PROCESS
    3.
    发明公开
    SYSTEM AND METHOD FOR PURIFICATION OF SILANE USING LIQUID NITROGEN IN A POLYSILICON PRODUCTION PROCESS 审中-公开
    系统和方法清洁士兰微用液氮IN A POLYSILICIUMHERSTELLUNGSVERFAHREN

    公开(公告)号:EP2641044A1

    公开(公告)日:2013-09-25

    申请号:EP11842423.3

    申请日:2011-11-08

    IPC分类号: F25J3/08

    CPC分类号: F25J3/00 C01B33/035 H02K21/38

    摘要: A system and method for improved cryogenic cooling of process streams in polysilicon manufacturing is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen process stream.

    SYSTEM AND METHOD FOR CRYOGENIC COOLING OF A PROCESS STREAM WITH ENHANCED RECOVERY OF REFRIGERATION
    4.
    发明公开
    SYSTEM AND METHOD FOR CRYOGENIC COOLING OF A PROCESS STREAM WITH ENHANCED RECOVERY OF REFRIGERATION 审中-公开
    系统和方法具有冷却改善恢复的过程流的低温冷却

    公开(公告)号:EP2641042A1

    公开(公告)日:2013-09-25

    申请号:EP11841349.1

    申请日:2011-11-08

    IPC分类号: F25J3/00

    CPC分类号: F25J3/06 C01B33/02 H02K21/38

    摘要: A system and method for improved cryogenic cooling of process gases is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen gas process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen gas stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen gas process stream.