摘要:
A method and apparatus for condensing vapor in a gas. A cryogen, such as liquid nitrogen, may be provided into first and second coil sets in a condenser housing to cool the condensable vapor in the housing to condense the vapor into a liquid or solid form. The flow of cryogen in the first and second coil sets may be independently controlled, coils in the first and/or second coil sets may have a substantially equal length, and/or coils in the first and/or second coil sets may have uppermost portions that are located at a substantially equal height.
摘要:
A system and method for improved cryogenic cooling of process streams in polysilicon manufacturing is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen process stream.
摘要:
A system and method for improved cryogenic cooling of process gases is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen gas process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen gas stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen gas process stream.