公开(公告)号：EP1123181A4

公开(公告)日：2003-07-02

申请号：EP99946616

申请日：1999-08-23

申请人： SUPERIOR MICROPOWDERS LLC

发明人： BREWSTER JAMES H ,  DERICOTTE DAVID E ,  HAMPDEN-SMITH MARK J ,  KODAS TOIVO T ,  POWELL QUINT H

IPC分类号： C01B17/42 ,  B01J2/04 ,  B01J13/00 ,  B01J19/00 ,  B05B17/06 ,  B22F9/02 ,  C01F17/00 ,  C01G9/02 ,  C01G9/08 ,  C01G23/00 ,  B29B9/00

CPC分类号： B01J2/04 ,  B05B17/0615 ,  B22F9/026 ,  B22F2999/00 ,  B22F2202/01

摘要： Provided is an aerosol manufacture facility including an aerosol generator (600), an aerosol heater (602), an aerosol cooler (604), a particle collector (606), a precursor liquid supply system (608), a carrier gas supply system (610) and a cooling gas supply system (612) and optionally other components. Also provided is an aerosol method for manufacturing particles in the aerosol manufacture facility, which, in one embodiment, involves automated process control.