公开(公告)号：EP1873914A1

公开(公告)日：2008-01-02

申请号：EP06731237.1

申请日：2006-03-30

申请人： Seiko Epson Corporation

发明人： KURODA, Takahiro ,  TANADA, Hideo

IPC分类号： H03H9/215 ,  H03H9/19 ,  H03H3/02 ,  H01L41/09 ,  H01L41/22

CPC分类号： H03H9/0595 ,  H03H3/04 ,  H03H9/1035 ,  H03H9/215 ,  H03H2003/026

摘要： A crystal resonator has a structure in which upper and lower substrates are stacked and integrally and airtightly bonded to the upper and lower surfaces of an intermediate crystal plate. The upper and lower substrates have a concavity on their surfaces facing the intermediate crystal plate to define a cavity in which the crystal resonator element is airtightly sealed in a cantilever manner. The upper and lower bonding surfaces of the intermediate crystal plate are mirror-polished and then provided with a conductive film. Each bonding surface of the upper and lower substrates is a mirror-polished crystal surface.

摘要翻译： 晶体谐振器具有上下基板层叠并一体地且气密地粘合到中间晶体板的上表面和下表面的结构。 上基板和下基板在其面向中间晶体板的表面上具有凹面以限定其中晶体谐振器元件以悬臂方式气密地密封的空腔。 将中间晶体板的上下接合面进行镜面抛光，然后设置导电膜。 上下基板的每个接合表面是镜面抛光的晶体表面。