摘要:
A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the quartz crystal axes of a quartz crystal. The quartz crystal resonator element includes a base (10), a pair of resonating arms (11) extending from the base in the Y-axis direction, and a positive X-axis notch (12) and a negative X-axis notch (13) formed by notching the base in the X-axis direction. The positive X-axis notch (12) is formed by notching the base (10) from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch (12) increases as it approaches the outer circumference.
摘要:
L'invention se rapporte à un résonateur thermocompensé comportant un corps utilisé en déformation, l'âme (58, 58', 18) du corps (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) étant formé à partir d'une plaque coupée dans un cristal de quartz. Selon l'invention, le corps (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) comporte un revêtement (52, 54, 56, 52', 54', 56', 16) déposé au moins partiellement contre l'âme (58, 58', 18), l'angle (θ) de coupe de la plaque et l'épaisseur ( d ) du revêtement (52, 54, 56, 52', 54', 56', 16) étant adaptés en fonction des coefficients thermoélastiques dudit revêtement afin d'obtenir des coefficients thermiques aux premier et deuxième ordres (α,β) sensiblement nuls. Les géométries du résonateur comprennent celle d'un balancier-spiral, diapason ou plus généralement MEMS. Le revêtement peut compter du dioxyde de germanium. L'invention concerne le domaine des bases de temps et de fréquence.
摘要:
A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the quartz crystal axes of a quartz crystal. The quartz crystal resonator element includes a base (10), a pair of resonating arms (11) extending from the base in the Y-axis direction, and a positive X-axis notch (12) and a negative X-axis notch (13) formed by notching the base in the X-axis direction. The positive X-axis notch (12) is formed by notching the base (10) from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch (12) increases as it approaches the outer circumference.
摘要:
There is provided a piezoelectric vibrating reed (32), including: a base (51) formed of a piezoelectric material and having a predetermined length; a plurality of vibrating arms (35),(36) extended from one side of the base; a support arm (61) extended in a width direction from the other side spaced apart from the one side of the base by a predetermined interval and extended outside the vibrating arms in the same direction as the vibrating arms; and a cut portion (71) formed in the piezoelectric material reducing its width direction at a location closer to the vibrating arms than a connection portion where the support arms are connected to the base as one body, wherein a through-hole (80) is also disposed at a location closer to the vibrating arms than the connection portion where the support arms are connected to the base as one body.
摘要:
The tuning fork piezoelectric resonator (1 ) according to the invention comprises a base part (4) from which protrudes first and second parallel vibrating arms (2, 3) carrying a set of excitation electrodes (5, 6) to make them vibrate, the set of excitation electrodes being formed by conductive deposits and comprising central electrodes (6a, 6b) on opposite main surfaces (9a, 9b) and lateral electrodes (5a, 5b) covering lateral surfaces (10a, 10b) of each vibrating arm, the central electrodes of the first arm and the lateral electrodes of the second arm being connected to a first pole of an excitation source and the lateral electrodes of the first arm and the central electrodes of the second arm being connected to a second pole of the excitation source, wherein on each vibrating arm, the conductive deposits forming the central electrodes and lateral electrodes are made for the ones with an oxidizable metal and for the others with an unoxidizable metal or conversely.
摘要:
To provide a tuning fork type quartz resonator having a low CI value and a quartz resonator package provided with the quartz resonator. A silicon material lower in specific gravity and stiffness than those of conventionally used gold (Au) is used as an electrode material for an electrode pattern such as excitation electrodes for making the tuning fork type quartz resonator generate tuning fork oscillation. By this structure, the quartz resonator is made easier to oscillate so that the oscillation loss (CI value) can be lowered during conversion of electric energy into tuning fork oscillation.
摘要:
A piezoelectric vibration piece capable of producing a proper vibration by controlling the vertical motion of vibration arms without causing a rise in CI value to ensure rigidity over the almost entire lengths of vibration arms, and a piezoelectric device using this piezoelectric vibration piece. The piezoelectric vibration piece comprises a pair of vibration arms (34, 35) formed of a piezoelectric material and extending in parallel from a base (51), bottomed grooves (44, 44) respectively provided in respective vibration arms and extending in the lengthwise direction of the vibration arms, and supports (45, 45) provided to cross the grooves in a widthwise direction, for integrally joining the materials constituting vibration arms separated by the grooves in a widthwise direction.