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    SUBSTRATE STORING CONTAINER
    1.
    发明公开
    SUBSTRATE STORING CONTAINER 审中-公开
    基板储存容器

    公开(公告)号：EP2537780A1

    公开(公告)日：2012-12-26

    申请号：EP11744604.7

    申请日：2011-02-14

    申请人： Shin-Etsu Polymer Co., Ltd.

    发明人： FUJIMORI, Yoshiaki ,  OGAWA, Osamu

    IPC分类号： B65D85/86 ,  B65D85/00 ,  H01L21/673

    摘要： To provide a substrate storage container that can inhibit a container body, door and other parts from being electrified to attract particles, hence can prevent particles from staining substrates.
    In a substrate storage container which includes: a container body 1 that stores semiconductor wafers W being supported by pairs of left and right supporting pieces 2; a removable door 10 that opens and closes an open front of container body 1; and an interface portions 40 that is provided in container body 1 and door 10 and are connected to a load port apparatus 31 of processing equipment, door 10 is positioned and connected to load port apparatus 31 when the open front of container body 1 is opened and closed by door 10. Container body 1, its paired supporting pieces 2, door 10 and interface portions 40 are all formed of conductive materials so that their surface resistance values are specified to fall within the range of 10 3 to 10 12 Q, to thereby inhibit adherence of particles to these due to electrification of static electricity.

    摘要翻译： 本发明提供一种基板收纳容器，其能够抑制容器主体，门等的通电而吸引微粒，因此能够防止微粒污染基板。 本发明提供一种基板收纳容器，该收纳容器具有：容纳由左右一对支承片2支承的半导体晶片W的容器主体1; 打开和关闭容器主体1的敞开前部的可拆卸门10; 以及设置在容器主体1和门10上并与处理装置的装载口装置31连接的接口部40，当容器主体1的开放前部打开时，门10定位并连接到装载口装置31， 由门10关闭。容器主体1，其成对的支撑件2，门10和接口部分40均由导电材料形成，使得它们的表面电阻值被指定为落在103至1012Ω的范围内，从而抑制粘附 由于静电的带电，这些颗粒对这些颗粒。

    RETAINER AND SUBSTRATE STORING CONTAINER
    3.
    发明公开
    RETAINER AND SUBSTRATE STORING CONTAINER 有权
    HALTEVORRICHTUNG UNDBEHÄLTERFÜRSUBSTRATAUFBEWAHRUNG

    公开(公告)号：EP2207199A1

    公开(公告)日：2010-07-14

    申请号：EP08846396.3

    申请日：2008-10-30

    申请人： Shin-Etsu Polymer Co. Ltd.

    发明人： OGAWA, Osamu

    IPC分类号： H01L21/673 ,  B65D85/86

    CPC分类号： H01L21/67369

    摘要： To provide a retainer and a substrate storage container which can prevent contamination and damage accompanying the turning of substrates, alleviate impacts acting on the substrates to thereby eliminate the risk of the substrates from dislodging and being broken and which can simplify the task of attaching the retainer-equipped door to the container body.
    A retainer 20 is formed of a frame 21 attached to the backside central part 13 of a door 10 of a substrate storage container, a pair of first elastic parts 29 projected from a pair of opposing parts 22 of frame 21 so as to approach each other and a second elastic part 31 that is supported at bent free ends 30 of the paired first elastic parts 29 to hold a semiconductor wafer W. Further, the outside end 32 of the second elastic part 31 is positioned outside free end 30 of first elastic part 29 and closer to the opposing part 22 of frame 21, and a multiple number of first and second holds 33 and 34 for holding the rim on the front side of semiconductor wafer W are formed apart from each other, the second hold 34 being positioned closer to the outside end 32 side of the second elastic part 31 than the first hold 33 is.

    摘要翻译： 为了提供能够防止伴随基板转动的污染和损坏的保持器和基板存储容器，减轻作用在基板上的冲击，从而消除基板脱落和破损的风险，并且这可以简化附接保持器的任务 装有容器主体的门。 保持架20由安装在基板收容容器的门10的背侧中心部13上的框架21构成，一对第一弹性部29从框架21的一对相对部22突出以彼此接近 以及第二弹性部31，其被支撑在成对的第一弹性部29的自由端30的弯曲处，以保持半导体晶片W.另外，第二弹性部31的外端32位于第一弹性部31的自由端30的外侧 29并且更靠近框架21的相对部分22，并且用于将边缘保持在半导体晶片W的前侧上的多个第一和第二保持件33和34彼此分开地形成，第二保持件34位于更靠近 到第二弹性部31的外端32侧。