Patent search ap:("UNIV ILLINOIS") AND inv:"PRICE ANDREW J" Page 1

1.

发明公开
MICROCAVITY PLASMA DEVICES WITH NON-UNIFORM CROSS-SECTION MICROCAVITIES 有权
Title translation: 微腔等离子体设备使用微腔混合配置

公开(公告)号：EP2203940A4

公开(公告)日：2011-03-02

申请号：EP08841926

申请日：2008-10-27

Applicant: UNIV ILLINOIS

Inventor： EDEN J GARY , PARK SUNG-JIN , KWANG-SOO KIM , PRICE ANDREW J

IPC: H01L29/10 , C25D11/04 , H01J17/49 , H01L29/12

CPC classification number: H01J11/18 , C25D11/12 , C25D11/26 , H01J9/241 , H01J61/82

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