公开(公告)号：EP1224682A1

公开(公告)日：2002-07-24

申请号：EP00968408.5

申请日：2000-09-26

申请人： Varian Semiconductor Equipment Associates Inc.

发明人： WALTHER, Steven, R. ,  WHITE, Nicholas, R.

IPC分类号： H01J37/317 ,  H01J37/15 ,  H01J37/147 ,  G21K1/087

CPC分类号： H01J37/1474 ,  G21K1/087 ,  H01J37/15 ,  H01J37/3171 ,  H01J2237/30483

摘要： Methods and apparatus are provided for scanning a charged particle beam. The apparatus includes scan elements and a scan signal generator for generating scan signals for scanning the charged particle beam in a scan pattern having a scan origin. In one embodiment, the apparatus includes a position controller for positioning the scan elements based on a parameter of the charged particle beam, such as energy. The scan elements may be positioned to achieve a fixed position of the scan origin for different beam energies. In another embodiment, the apparatus includes first and second sets of scan elements and a scan signal controller for controlling the scan signals supplied to the sets of scan elements based on a parameter of the charged particle beam, such as energy. The scan signal controller may control the ratio of the scan signals applied to the sets of scan elements, or may deenergize a set of scan elements, to minimize space charge forces on the charged particle beam that may reduce beam transmission through the apparatus.

公开(公告)号：EP0871843B1

公开(公告)日：2003-05-14

申请号：EP95936873.9

申请日：1995-10-17

申请人： Varian Semiconductor Equipment Associates Inc.

发明人： WHITE, Nicholas, R.

IPC分类号： F28F7/00 ,  H01L21/00

CPC分类号： H01L21/67109 ,  H01L21/67103 ,  H01L21/6831 ,  Y10T279/23