公开(公告)号：EP1429380A1

公开(公告)日：2004-06-16

申请号：EP02760759.7

申请日：2002-08-28

申请人： Zeon Corporation ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  JIMBO, T., c/o Zeon Corp., Res & Dev. Center ,  MURAKAMI, T., c/o Zeon Corp., Res & Dev. Center

IPC分类号： H01L21/68 ,  C08L5/00 ,  B29B13/06 ,  B29C45/00 ,  B65D85/86 ,  C08L65/00 ,  C08L101/00

CPC分类号： H01L21/67303 ,  H01L21/67306 ,  H01L21/67313 ,  H01L21/67316 ,  H01L21/6732 ,  H01L21/67323 ,  H01L21/67326 ,  H01L21/6733 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67386 ,  Y10T428/13 ,  Y10T428/1303 ,  Y10T428/1352 ,  Y10T428/1359 ,  Y10T428/1386 ,  Y10T428/139

摘要： A container for precision substrate having one or more component formed by molding a thermoplastic resin, characterized in that the component satisfies characteristics [1] and [2] below. [1] When being brought to contact ultra high purity argon gas (impurity concentration: 1 ppb or less) at 25°C having a flow rate of 1.2 L/min., a water amount in said argon gas after 300 minutes is 30 ppb or less per a surface area 1 cm 2 of the component. [2] When being placed in the air at 100°C, an increase amount of organics in the air in 300 minutes is 150 ng or less per weight 1 g of the component. According to the container, demands for low contamination can be satisfied.

摘要翻译： 一种用于通过模制热塑性树脂形成的具有一种或多种组分的精密基材的容器，其特征在于，该组分满足以下特征Ä1Ü和Ä2Ü。 Ä1Ü当接触流量为1.2升/分钟的25℃的超高纯度氩气（杂质浓度：1ppb以下）时，300分钟后的氩气中的水量为30ppb以下 每个表面积1厘米2的组分。 Ä2Ü当放置在100℃的空气中时，300分钟内空气中有机物的增加量为每重量150纳克1g组分。 根据容器，可以满足低污染的要求。