公开(公告)号：EP1827834A1

公开(公告)日：2007-09-05

申请号：EP05825105.9

申请日：2005-11-18

Applicant: Agilent Technologies, Inc.

Inventor： BEERLING, Timothy ,  AIMI, Marco

IPC: B41J2/14

CPC classification number: B01L3/0262 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2400/0487 ,  B81B1/004 ,  B81B2201/057 ,  B81B2201/058 ,  B81B2203/0353 ,  H01H11/02 ,  H01H2029/008 ,  Y10T428/24273 ,  Y10T428/2902

Abstract: A micro-machined nozzle includes a substrate (12) having a hole (14) formed on a first side (12a) that extends partially through a thickness dimension of the substrate (12) and a nozzle orifice (16) formed on a second opposite side (12b) that communicates with the hole (14). The nozzle orifice (16) has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side (12a) of a silicon substrate (12) to form a hole (14) that extends partially through a thickness dimension of the substrate (12) and etching a second opposite side (12b) of the silicon substrate (12) to form a serrated nozzle orifice (16) that communicates with the hole (14).