Pressure control apparatus
    12.
    发明公开
    Pressure control apparatus 失效
    Druckregelvorrichtung。

    公开(公告)号:EP0402018A1

    公开(公告)日:1990-12-12

    申请号:EP90305733.9

    申请日:1990-05-25

    IPC分类号: G05D16/20

    摘要: A pressure control apparatus suitable for controlling pressures in autoclaves permits a plurality of autoclaves (1 - 8) to be selectably pressurized from a single pressurizing circuit (30,32,34,36). The apparatus can be externally controlled (4) to more efficiently multiplex autoclaves to the pressurizing circuit and to more efficiently implement different pressure schedules for the autoclaves. Once a pressure has been set for an autoclave maintained in communication with the main pressurizing circuit, the apparatus automatically monitors the position of the pump piston (34) and resets it from either of its extreme limits of movement to maintain pressure at a desired set point.

    摘要翻译: 适用于控制高压釜中的压力的​​压力控制装置允许从单个加压回路(30,32,34,36)可选地加压多个高压釜(1-8)。 该设备可以被外部控制(4)以更有效地将高压釜多次加压到加压回路,并且更有效地实现高压釜的不同压力计划。 一旦为与主加压回路保持连通的高压釜设定了压力,则该装置自动监测泵活塞(34)的位置,并将其从其任何极限运动中重新设定,以将压力保持在所需设定点 。

    HIGH PRESSURE BIDIRECTIONAL MINIATURE ELECTRIC GAS PUMP
    14.
    发明公开
    HIGH PRESSURE BIDIRECTIONAL MINIATURE ELECTRIC GAS PUMP 有权
    BIDIREKTIONALE ELEKTRISCHE MINIATUR-HOCHDRUCKGASPUMPE

    公开(公告)号:EP2944937A1

    公开(公告)日:2015-11-18

    申请号:EP15175217.7

    申请日:2011-07-27

    发明人: Jiang, Weili

    摘要: The present invention refers to a high pressure bidirectional miniature electric gas pump, comprising a motor (1), an eccentric shaft (2), a swing rod, a pump body, a left cylinder body and a right cylinder body, a piston rod, and an one-way valve body and a cylinder head attached to each of the cylinder bodies, wherein the pump body is a connecting member, the motor is fixed to the pump body, and a motor shaft extends into the pump body and is connected with the eccentric shaft; the eccentric shaft is of a cylindrical shape, and has at one end thereof a driving pin (21) deviated from the motor shaft axis, the driving pin extending through a mounting hole in the flat-shaped swing rod located below the eccentric shaft; the swing rod is connected to the piston rod disposed horizontally therebelow through a screw, with a gap existing between the swing rod and the piston rod; the piston rod (10) is of a cylindrical shape, and opposite ends thereof are mounted with sealing rings and extend into the left and right cylinder bodies, respectively, the sealing rings being hermetically fitted with inner walls of the cylinder bodies; the cylinder body is of a cylindrical structure, and the two cylinder bodies are fixedly mounted at opposite ends of the pump body, respectively, taking the piston rod (10) horizontally disposed therein as an axis; and each of the cylinder bodies is sequentially provided at an outer end thereof with the one-way valve body and the cylinder head, the one-way valve body being installed at an inner side of the cylinder head, communicated with an inner cavity of the cylinder body, and communicated with external air or compressed air lines through passages in the cylinder head.

    摘要翻译: 本发明涉及一种高压双向微型电动气泵,包括电动机(1),偏心轴(2),摆杆,泵体,左气缸体和右气缸体,活塞杆, 以及安装在各缸体上的单向阀体和气缸盖,其中,泵体为连接部件,电动机固定在泵体上,电动机轴延伸到泵体内并与 偏心轴; 所述偏心轴为圆筒状,其一端具有偏离所述马达轴线的驱动销(21),所述驱动销延伸穿过位于所述偏心轴下方的所述平面摆动杆中的安装孔; 摆杆连接到水平位于下方的螺杆上的活塞杆,摆动杆和活塞杆之间存在间隙; 活塞杆(10)为圆筒状,其两端分别安装有密封环,分别延伸到左右筒体内,密封环与气缸体的内壁气密配合; 缸体为圆柱形结构,两个缸体分别以水平设置在其中的活塞杆(10)为轴,固定地安装在泵体的相对端; 并且每个缸体在其外端依次设置有单向阀体和气缸盖,单向阀体安装在气缸盖的内侧,与内腔相连通 并且通过气缸盖中的通道与外部空气或压缩空气管线连通。

    METHOD AND APPARATUS FOR MONITORING AND CONTROLLING PRESSURE IN AN INFLATABLE DEVICE
    16.
    发明公开
    METHOD AND APPARATUS FOR MONITORING AND CONTROLLING PRESSURE IN AN INFLATABLE DEVICE 审中-公开
    方法和设备进行监测和控制充气设备中的压力

    公开(公告)号:EP2001341A2

    公开(公告)日:2008-12-17

    申请号:EP07760123.5

    申请日:2007-04-04

    IPC分类号: A47C27/08

    摘要: In one aspect, the invention provides a method for a user to adjust a pressure in an inflatable device. The method includes acts of adjusting the pressure in the inflatable device with a control device to a pressure preferred by the user, where the pressure preferred by the user has a first value, and establishing a first setting corresponding to the pressure preferred by the user with the control device, and automatically establishing a second setting corresponding to a second pressure having a second value once the first setting is established, where the second value differs from the first value by a predetermined amount.

    PRESSURE CONTROL METHOD
    17.
    发明公开
    PRESSURE CONTROL METHOD 有权
    压力控制方法

    公开(公告)号:EP1706803A1

    公开(公告)日:2006-10-04

    申请号:EP05701892.1

    申请日:2005-01-14

    申请人: The BOC Group plc

    IPC分类号: G05D16/20

    CPC分类号: G05D16/208

    摘要: The present invention relates to a method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow into and/or out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow into and/or out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure. Iperiod has elapsed for achieving and maintaining the required pressure.

    Verfahren zur Regelung des Kopfdrucks in einem mit Flüssigkeit gefüllten Behälter
    19.
    发明公开
    Verfahren zur Regelung des Kopfdrucks in einem mit Flüssigkeit gefüllten Behälter 审中-公开
    埃菲尔铁塔维尔德格勒维尔·贝尔斯特(Verfahren zur Regelung des Kopfdrucks in einem mitFlüssigkeitgefülltenBehälter

    公开(公告)号:EP1503263A2

    公开(公告)日:2005-02-02

    申请号:EP04016881.7

    申请日:2004-07-16

    IPC分类号: G05D16/20

    CPC分类号: G05D16/208

    摘要: Bei einem Verfahren zur Regelung des Kopfdrucks K in einem mit Flüssigkeit gefüllten Behälter 4 wird zusätzlich zum Druckwert K der Füllstandswert H zur Kopfdruckregelung eingesetzt. Dadurch kann der Kopfdruck K im Behälter 4 wesentlich genauer geregelt werden.

    摘要翻译: 压力传感器(3)检测容器(4)中的头部压力(K)。 提供一个3/2通阀(5)来影响头部压力。 除了压力值(K)之外,评估液体的液位(H),例如, 使用雷达液位计,并用于头部压力控制。

    Contrôle de pression dans la chambre de procédés par variation de vitesse de pompes, vanne de régulation et injection de gaz neutre
    20.
    发明公开
    Contrôle de pression dans la chambre de procédés par variation de vitesse de pompes, vanne de régulation et injection de gaz neutre 有权
    DruckregelungssystemfürProzesskammer auf der Basis der Pumpengeschwindigkeit,derVentilöffnungund Neutralgasinjektion

    公开(公告)号:EP1475535A1

    公开(公告)日:2004-11-10

    申请号:EP04291149.5

    申请日:2004-05-04

    申请人: ALCATEL

    摘要: Un système de pompage des gaz selon l'invention permet de pomper les gaz d'une chambre de procédés (1) pour réguler sa pression en fonction des étapes du procédé. Le système comprend une pompe primaire (2), une pompe secondaire (8), un dispositif d'injection de gaz neutre (6), et une vanne de régulation (4). La pompe primaire (2) et/ou secondaire (8) est commandée en vitesse pour réguler les variations à plus grande amplitude. La vanne de régulation (4) est commandée en ouverture pour réguler les variations d'amplitude faible et rapide. L'injection de gaz neutre (6) est pilotée en débit pour réguler les variations d'amplitude moyenne. On assure ainsi une grande stabilité de réaction et une grande plage de variation possible des conditions dans la chambre de procédés (1).

    摘要翻译: 该装置具有联接到相应控制单元(3,11)的两个泵(2,8),用于控制泵的速度。 控制阀(4)联接到泵(2)的输入端和控制控制阀的第三控制单元(5)。 惰性气体注入器(6)通过配有注射阀的注射管将惰性气体注入控制阀。 喷射阀由第四控制单元控制。 控制阀由第三控制单元控制,以补偿处理室内气体的压力和流量的微弱幅度的快速变化。 惰性气体喷射器中的惰性气体的流动由第四控制单元控制,以补偿处理室中气体的压力和流量的强幅度的变化。 两个泵的速度由相应的控制单元控制,以补偿处理室中的压力条件的幅度的高度变化。 还包括以下独立权利要求:(a)半导体制造装置或微电子机械系统(b)制造半导体或微电子机械系统的过程。