公开(公告)号：EP2455809A2

公开(公告)日：2012-05-23

申请号：EP11358012.0

申请日：2011-11-15

申请人： Shin-Etsu Chemical Co., Ltd.

发明人： Shirasaki, Toru

IPC分类号： G03F1/62 ,  G03F1/64

CPC分类号： G03F1/62 ,  G03F1/64

摘要： There is provided a pellicle in which the mask-bonding agglutinant layer has the adhesion strength of 1 N/m through 100 N/m, preferably 4 N/m through 80 N/m, and more preferably the agglutinant layer has a facial flatness of 15 micrometers or smaller, and still more preferably the membrane-bonding adhesive layer has a facial flatness of 15 micrometers or smaller: for the purpose of better preventing the pellicle frame from affecting the mask to deform.

摘要翻译： 提供一种防护薄膜，其中掩模粘合凝集层的粘合强度为1N / m至100N / m，优选为4N / m至80N / m，更优选地，粘着强度层具有面状平坦度 15微米以下，进一步优选膜粘合层具有15微米或更小的面部平整度：为了更好地防止防护薄膜组件框架影响掩模变形。