公开(公告)号：EP2183514A1

公开(公告)日：2010-05-12

申请号：EP08774761.4

申请日：2008-07-04

申请人： Robert Bosch GmbH

发明人： PIRK, Tjalf ,  STUMBER, Michael

IPC分类号： F16K99/00

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F16K99/0015 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0094 ,  Y10T29/49236 ,  Y10T137/7779 ,  Y10T137/778 ,  Y10T137/7837 ,  Y10T137/7879 ,  Y10T137/7895

摘要： The invention relates to a micro valve (1), comprising a first valve chamber (4) and a second valve chamber (5) and a closing member (8), that can be changed from an open position, in which the valve chambers (4, 5) are connected to each other, to a closed position, in which the valve chambers (4, 5) are separated from each other. According to the invention, a reference chamber (7) is provided, which is delimited by the closing member (8). The invention further relates to a production method for a micro valve (1) and a micro pump (15).