VERFAHREN ZUM BETREIBEN EINES ELEKTROSTATISCHEN ANTRIEBS UND ELEKTROSTATISCHE ANTRIEBE
    9.
    发明公开
    VERFAHREN ZUM BETREIBEN EINES ELEKTROSTATISCHEN ANTRIEBS UND ELEKTROSTATISCHE ANTRIEBE 有权
    一种用于操作静电驱动和静态DRIVES

    公开(公告)号:EP2359464A2

    公开(公告)日:2011-08-24

    申请号:EP09783351.1

    申请日:2009-09-24

    申请人: Robert Bosch GmbH

    IPC分类号: H02N1/00

    摘要: The invention relates to a method for operating an electrostatic drive having a stator electrode (50) and an actuator electrode (52), which are designed as multilayer electrodes, wherein the actuator electrode (52) in the de-energized starting position, without a voltage applied between a stator electrode subunit (50b, 50c) and an actuator electrode subunit (52b, 52c), is arranged with respect to the stator electrode (50) such that the first actuator electrode subunit (52b) has a smaller distance from the first stator electrode subunit (50b) than the second actuator electrode subunit (52c), comprising the steps of: predeflecting the actuator electrode (52) with respect to the stator electrode (50) out of the de-energized starting position and into a first end position by applying a first potential (
    π 1) to the first stator electrode subunit (50b) and applying a second potential (
    π 2) deviating from the first potential (
    π 1) to the first actuator electrode subunit (52b); and applying a third potential (
    π 3) to the second stator electrode subunit (50c) and to the second actuator electrode subunit (52c), which deviates from the first potential (
    π 1) and the second potential (
    π 2).