摘要:
The invention relates to an electrode material (11,12) for a lithium-cell (10), in particular a dry battery cell, which comprises at least one electrode-active material (11a, 12a) which can be lithiated. In order to improve the performance of a cell (10) provided with said material, said material (11,12) also comprises at least one organic binder (11b,12b) and at least one solid body lithium ion conductor (11c,12c) selected from the group consisting of lithium-argyrodites and lithium ion-conducting glass. The invention also relates to a lithium cell and lithium battery and to the use thereof.
摘要:
The invention relates to a method for the plasma free etching of silicon with an etching gas ClF3 (15) or XeF2 and to the use thereof. The silicon comprises one or several areas (20) which are to be etched, as a layer on a substrate (1) or as a substrate material. The silicon is transformed into a mixing semiconductor SiGe (40) by introducing germanium (30, 35) and is etched by supplying etching gas ClF3 (15) or XeF2. The germanium (30, 35) is introduced and the etching gas ClF3 (15) or XeF2 is supplied in a temporally parallel or alternating manner. The invention relates to, in particular, the introduction of germanium (30, 35) by implanting germanium-ions (35) into the silicon.
摘要:
The invention relates to a method for operating an electrostatic drive having a stator electrode (50) and an actuator electrode (52), which are designed as multilayer electrodes, wherein the actuator electrode (52) in the de-energized starting position, without a voltage applied between a stator electrode subunit (50b, 50c) and an actuator electrode subunit (52b, 52c), is arranged with respect to the stator electrode (50) such that the first actuator electrode subunit (52b) has a smaller distance from the first stator electrode subunit (50b) than the second actuator electrode subunit (52c), comprising the steps of: predeflecting the actuator electrode (52) with respect to the stator electrode (50) out of the de-energized starting position and into a first end position by applying a first potential ( π 1) to the first stator electrode subunit (50b) and applying a second potential ( π 2) deviating from the first potential ( π 1) to the first actuator electrode subunit (52b); and applying a third potential ( π 3) to the second stator electrode subunit (50c) and to the second actuator electrode subunit (52c), which deviates from the first potential ( π 1) and the second potential ( π 2).
摘要:
The invention relates to a method for producing porous microstructures (8, 8') in an Si semiconductor substrate (1), to porous microstructures (8, 8') produced according to this method and to the use thereof.