公开(公告)号：EP2325862A1

公开(公告)日：2011-05-25

申请号：EP09176323.5

申请日：2009-11-18

Applicant: FEI COMPANY

Inventor： Henstra, Alexander

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

Abstract: Commercially available High Resolution Transmission Electron Microscopes (HR-TEM) and Scanning Transmission Electron Microscopes (HR-STEM) are nowadays equipped with correctors for correcting the axial spherical aberration C S of the so-named objective lens. Inevitably other aberrations become the limiting aberration. For the hexapole type correctors, also known as Rose correctors, or variants thereof, six-fold axial astigmatism, also known as A5, and sixth-order three lobe aberration, also known as D6, introduced by the corrector, are known to become the limiting aberration.
The invention shows that by adding a weak hexapole (126) in the cross-over between the hexapoles (110,112), a Rose like corrector or a Crewe like corrector free of A5 or D6 can be made, or, by adding both the weak hexapole (126) and a dodecapole (128), a corrector that is free of both A5 and D6.

Abstract translation: 市售高分辨率透射电子显微镜（HR-TEM）和扫描透射电子显微镜（HR-STEM）目前配备有用于校正所谓物镜的轴向球差CS的校正器。 其他像差不可避免地会成为极限像差。 对于也称为玫瑰校正器或其变体的六极型校正器，已知由校正器引入的六倍轴向散光（也称为A5）和六阶三瓣衍射（也称为D6）已知成为 限制像差。 本发明显示，通过在六极（110,112）之间的交叉处添加弱六极杆（126），可以制造不含A5或D6的玫瑰状校正器或克鲁维样校正器，或者通过添加弱六极杆 （126）和十二极（128），校正器不含A5和D6。

公开(公告)号：EP1783812A3

公开(公告)日：2008-03-05

申请号：EP06123314.4

申请日：2006-11-01

Applicant: FEI COMPANY

Inventor： Henstra, Alexander ,  Scheinfein, Michael

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

公开(公告)号：EP1783812A2

公开(公告)日：2007-05-09

申请号：EP06123314.4

申请日：2006-11-01

Applicant: FEI COMPANY

Inventor： Henstra, Alexander ,  Scheinfein, Michael

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

Abstract translation: 本发明描述了用于校正像在SEM或TEM中使用的粒子透镜中的色差的校正器。 为了降低对这种校正器的电源的稳定性要求，粒子束通过校正器的能量低于光束通过透镜的能量，以被校正。

公开(公告)号：EP1566826A1

公开(公告)日：2005-08-24

申请号：EP05075340.9

申请日：2005-02-11

Applicant: FEI COMPANY

Inventor： Chmelik, Jarolslav ,  Henstra, Alexander

IPC: H01J37/153 ,  H01J37/09 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/09 ,  H01J37/153 ,  H01J37/26

Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 13 eccentrically through a lens 6. As a result of this, energy dispersion will occur in an image 15 formed by the lens 6. By projecting this image 15 onto a diaphragm 7, it is possible to only allow particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 16 will have a reduced energy spread. By adding a deflection unit 10, this particle beam 16 can be deflected toward the optical axis 2. One can also elect to deflect a beam 12 going through the middle of the lens 6 - and having, for example, greater current - toward the optical axis.

Abstract translation: 本发明描述了发生能量选择的粒子源。 能量选择通过透镜6偏心地发送带电粒子13而发生。其结果是，由透镜6形成的图像15中会发生能量分散。通过将该图像15投影到膜片7上， 可能仅允许能谱范围的有限部分的粒子通过。 因此，通过的光束16将具有减小的能量扩展。 通过添加偏转单元10，该粒子束16可以朝向光轴2偏转。还可以选择使穿过透镜6的中部的光束12偏转并且具有例如更大的电流朝向光学 轴。