公开(公告)号：EP3203493B1

公开(公告)日：2018-10-03

申请号：EP16153875.6

申请日：2016-02-02

Applicant: FEI Company

Inventor： SED'A, Bohuslav ,  TUMA, Lubomír ,  HENSTRA, Alexander

IPC: H01J37/05 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0451 ,  H01J2237/0453 ,  H01J2237/1532 ,  H01J2237/2826

Abstract: A method of producing a corrected beam of charged particles for use in a charged-particle microscope, comprising the following steps: - Providing a non-monoenergetic input beam 3a of charged particles; - Passing said input beam through an optical module comprising a series arrangement of: –ª A stigmator 33, thereby producing an astigmatism-compensated, energy-dispersed intermediate beam 3b with a particular monoenergetic line focus direction; –ª A beam selector 37, comprising a slit 43-43b' that is rotationally oriented so as to match a direction of the slit to said line focus direction, thereby producing an output beam 3d comprising an energy-discriminated portion of said intermediate beam.

公开(公告)号：EP2956955B1

公开(公告)日：2018-09-05

申请号：EP14752094.4

申请日：2014-02-07

Applicant: Office Tandem LLC

Inventor： HOTTA, Masanao ,  ADACHI, Tatsuya

IPC: H01J49/42 ,  H01J49/36 ,  H01J37/05 ,  H01J37/244 ,  H01J37/252

CPC classification number: H01J49/06 ,  H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/26 ,  H01J49/36 ,  H01J49/421

Abstract: A mass analyzer includes two rotating electric field (REF) units, sinusoidal signal generators and a means for separation of dispersed ions. The REF units include a plurality of elongated electrodes surrounding a central axis, and are lined in tandem at elongated direction. Sinusoidal signals are applied to the electrodes to rotate electric fields within each REF unit. The means for separation is placed adjacent the downstream end of the 2nd REF unit. Ions enter the 1st REF unit, diverge outwards and leave the 1st REF unit on off-axis positions. The ions successively enter the 2nd REF unit and converge inwards because of 180 degrees phase difference from the 1st REF unit. Specified mass ions return to and travel along the central axis. However, unspecified mass ions deviate from the central axis and travel apart from the central axis. The means for separation separates specified ions from unspecified ions.

公开(公告)号：EP3330998A4

公开(公告)日：2018-08-01

申请号：EP16886330

申请日：2016-01-21

Applicant: JAPAN SYNCHROTRON RADIATION RES INSTITUTE

Inventor： MURO TAKAYUKI ,  MATSUSHITA TOMOHIRO

IPC: H01J37/244 ,  H01J37/05 ,  H01J49/46

CPC classification number: H01J49/488 ,  H01J37/05 ,  H01J37/244 ,  H01J49/022 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/24485

Abstract: In a retarding potential type energy analyzer including a front grid electrode 21, reference grid electrode 22 and rear grid electrode 23 sequentially arranged, with a predetermined amount of potential difference given between the reference grid electrode 22 and the front grid electrode 21 to form an upward potential gradient as well as a potential difference given between the reference grid electrode 22 and the rear grid electrode 23 to form a downward potential gradient, the grid electrodes are arranged so that the distance between the reference grid electrode 22 and the rear grid electrode 23 is shorter than the distance between the reference grid electrode 22 and the front grid electrode 21, or the potential difference between the reference grid electrode 22 and the rear grid electrode 23 is made to be greater than the potential difference between the reference grid electrode 22 and the front grid electrode 21.

公开(公告)号：EP3196920A1

公开(公告)日：2017-07-26

申请号：EP17152124.8

申请日：2017-01-19

Applicant: Gatan, Inc.

Inventor： TREVOR, Colin ,  LENT, Matthew ,  GUBBENS, Alexander Jozef ,  JAMES, Edward ,  TWESTEN, Ray Dudley ,  JOSEPH, Roice ,  PAREKH, SanJay ,  SHA, Thomas

IPC: H01J37/256 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J49/44 ,  G01N23/06 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/05 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.

Abstract translation: 描述了一种电子能量损失谱仪，其具有直接检测传感器，高速快门和传感器处理器，其中传感器处理器组合来自各个传感器读出的图像并将来自所述传感器的二维图像转换成一维谱，并且其中 将一维光谱输出到计算机，并将高速快门的操作与传感器成像的时序整合。 控制快门以允许减少对应于各个传感器读数的图像的曝光。 通过成像少于完全可能的曝光来曝光多个图像，并且其中多个图像被组合以形成合成图像。 多个图像可以包括通过将传感器暴露于不同的曝光时间而创建的图像。

公开(公告)号：EP2413346A4

公开(公告)日：2016-12-28

申请号：EP10755709

申请日：2010-03-26

Applicant: UNIV OSAKA ,  MSI TOKYO INC

Inventor： TOYODA MICHISATO ,  AOKI JUN ,  MIKI SHINICHI

IPC: H01J49/10 ,  G01N27/62 ,  H01J27/02 ,  H01J37/05 ,  H01J49/06 ,  H01J49/14 ,  H01J49/40

CPC classification number: H01J27/024 ,  H01J37/05 ,  H01J49/14 ,  H01J49/147 ,  H01J49/401 ,  H01J49/403

公开(公告)号：EP1657736B1

公开(公告)日：2016-12-14

申请号：EP04027115.7

申请日：2004-11-15

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Inventor： Brodie, Alan D. ,  Crewe, David A. ,  Frosien, Jürgen ,  Lanio, Stefan ,  Schönecker, Gerald

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/05

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

公开(公告)号：EP2851933B1

公开(公告)日：2016-10-19

申请号：EP14185601.3

申请日：2012-03-06

Applicant: Scienta Omicron AB

Inventor： Wannberg, Björn

IPC: H01J49/06 ,  H01J37/05 ,  H01J49/48 ,  G01N23/227

CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

Abstract translation: 本发明涉及一种用于确定与从粒子发射样品（11）发射的带电粒子有关的至少一个参数的方法，例如， 与能量，起始方向，起始位置或颗粒的旋转相关的参数。 该方法包括以下步骤：通过透镜系统（13）将带电粒子束引导到测量区域的入口，以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外，该方法包括以下步骤：在粒子束进入测量区域之前，在相同的坐标方向上将粒子束偏转至少两次。 因此，能够以在某种程度上不需要对样品（11）的物理操作的方式来控制测量区域（3）的入口（8）处的粒子束的位置和方向。 这又允许样品被有效地冷却，使得能量测量中的能量分辨率可以得到改善。

公开(公告)号：EP2511934B1

公开(公告)日：2015-11-18

申请号：EP12164204.5

申请日：2012-04-16

Applicant: FEI Company

Inventor： Tuggle, David ,  Parker, N. William

IPC: H01J37/05

CPC classification number: H01J37/05 ,  H01J2237/31749

公开(公告)号：EP2355125B1

公开(公告)日：2015-04-22

申请号：EP11152427.8

申请日：2011-01-27

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Preikszas, Dirk

IPC: H01J37/145 ,  H01J37/244 ,  H01J37/28 ,  H01J37/05

CPC classification number: H01J37/145 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28

公开(公告)号：EP2537174B1

公开(公告)日：2015-04-08

申请号：EP11744782.1

申请日：2011-02-14

Applicant: Canon Kabushiki Kaisha

Inventor： SUGA, Takeo

IPC: H01J37/22 ,  H01J37/26 ,  H01J49/40 ,  H01J37/05 ,  H01J37/28 ,  H01J49/00 ,  G06T5/20

CPC classification number: H01J37/28 ,  G06T5/003 ,  G06T5/20 ,  G06T2207/10061 ,  G06T2207/20008 ,  G06T2207/30024 ,  H01J37/05 ,  H01J37/22 ,  H01J49/0004 ,  H01J49/0036