TRACKING PICTURE TUBE
    73.
    发明公开
    TRACKING PICTURE TUBE 审中-公开
    INDEX-BILDRÖHRE

    公开(公告)号:EP1393343A2

    公开(公告)日:2004-03-03

    申请号:EP02727909.0

    申请日:2002-05-15

    IPC分类号: H01J31/20

    摘要: The present invention relates to a tracking picture tube of the type in which comb-shaped electrodes or optical detecting means (12, 13) are used for generating a signal related to the position of an electron beam with respect to the strips (5). The tube is characterized in that the deflection unit is arranged to deflect the beams (21r, 21g, 21b) onto selected strips (22r, 22g, 22b) having coincident sides which neighbour finger portions (14, 15) of the same electrode (12, 13), and the selected strips (22r, 22g, 22b), excited by the electron beams, are separated by at least one unexcited strip, respectively.

    SEM PROVIDED WITH AN ELECTROSTATIC OBJECTIVE AND AN ELECTRICAL SCANNING DEVICE
    76.
    发明公开
    SEM PROVIDED WITH AN ELECTROSTATIC OBJECTIVE AND AN ELECTRICAL SCANNING DEVICE 有权
    用静电透镜与电工拾取扫描型电子显微镜

    公开(公告)号:EP0968517A1

    公开(公告)日:2000-01-05

    申请号:EP98957066.8

    申请日:1998-12-14

    IPC分类号: H01J37/28

    摘要: The detector (6) for the secondary electrons in a SEM provided with an electrostatic objective (14, 16) is arranged ahead of the objective, thus enabling a high detection efficiency. According to the invention, the deflection of the beam is performed electrically and the deflection electrodes (10, 12) are arranged between the detector (6) and the last two electrodes (14, 16) of the objective. The beam deflection is realized by means of two oppositely directed electrical deflection fields in such a manner that the tilting point of the scanning motion is situated at the center (20) of the objective lens, thus avoiding additional lens defects and obstruction of the beam by the limited dimensions of the objective bore. This results in a large field of view, without loss of resolution. Furthermore, deflection by means of two oppositely directed fields has the effect that the paths (24) of the secondary electrons traveling to the detector (6) are shaped such that a larger part thereof reaches the detection material (6).