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公开(公告)号:EP4443101A1
公开(公告)日:2024-10-09
申请号:EP23166396.4
申请日:2023-04-03
申请人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO , Technische Universiteit Delft
IPC分类号: G01B9/02001 , G01B9/02055
CPC分类号: G01B9/02067 , G01B9/02007 , G01J9/02
摘要: A method and system for estimating a relative phase difference between a first light beam and a second light beam guided through a shared optical path, the first light beam having a first wavelength and the second light beam having a second wavelength different from the first wavelength, wherein one or more measurements are performed to measure a value indicative of the physical pathlength variation, and wherein the relative phase difference between the first light beam and the second light beam at a predetermined location of the optical path is determined based on the value indicative of the physical pathlength variation.
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公开(公告)号:EP4413677A1
公开(公告)日:2024-08-14
申请号:EP22789334.4
申请日:2022-10-04
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公开(公告)号:EP4211458B1
公开(公告)日:2024-05-29
申请号:EP21794205.1
申请日:2021-09-10
IPC分类号: G01N33/00
CPC分类号: G01N33/0098 , A01G7/00
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公开(公告)号:EP4364210A1
公开(公告)日:2024-05-08
申请号:EP22735647.4
申请日:2022-06-30
CPC分类号: B82Y10/00 , H01L29/66977 , H01L29/7613 , H01L29/423 , G06N10/40
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公开(公告)号:EP4364209A1
公开(公告)日:2024-05-08
申请号:EP22735644.1
申请日:2022-06-29
IPC分类号: H01L29/06 , H01L27/10 , H01L29/423 , H01L29/66 , H01L29/76 , H01L29/41 , B82Y10/00 , H01L29/12
CPC分类号: B82Y10/00 , H01L29/66977 , H01L29/7613 , H01L29/423 , G06N10/40 , H01L29/413 , H01L29/122 , H10N69/00
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公开(公告)号:EP4022132B1
公开(公告)日:2024-01-10
申请号:EP20765379.1
申请日:2020-08-28
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公开(公告)号:EP4170296B1
公开(公告)日:2023-10-11
申请号:EP21204188.3
申请日:2021-10-22
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公开(公告)号:EP3746407B1
公开(公告)日:2021-12-15
申请号:EP19714855.4
申请日:2019-01-31
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公开(公告)号:EP3741040A1
公开(公告)日:2020-11-25
申请号:EP19715263.0
申请日:2019-01-17
发明人: ISABELLA, Olindo , ZIAR, Hesan , ZEMAN, Miroslav
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公开(公告)号:EP2912442B1
公开(公告)日:2020-05-13
申请号:EP13786542.4
申请日:2013-10-24
发明人: KRUIT, Pieter
IPC分类号: G01N23/2251 , H01J37/244 , H01J37/317
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