摘要:
A sputtering apparatus (10) includes: a first target holder (111) and a second target holder (112) holding a first target (T1) and a second target (T2) respectively such that their surfaces face each other; a substrate holder (16) provided on a side of a plasma generation region (R) which is a region between the first target (T1) and the second target (T2) respectively held by the first target holder (111) and the second target holder (112); a first main magnetic field generation unit (121) and a second main magnetic field generation unit (122) respectively provided on the back surface sides of the first target holder (111) and the second target holder (112), and configured to generate a first main magnetic field and a second main magnetic field respectively on surfaces of the first target (T1) and the second target (T2) held, in which magnets are disposed such that opposite poles face each other; a power supply configured to generate an electric field in a plasma generation region (R) by applying predetermined potentials to the first target holder (111) and the second target holder (112); a radio-frequency electromagnetic field generation unit (17) configured to generate a radio-frequency electromagnetic field in the plasma generation region (R), which is provided on a side of the plasma generation region (R) facing the substrate holder (16) with the plasma generation region (R) between them; and a plasma source gas introduction unit (15) configured to introduce a plasma source gas into the plasma generation region (R), wherein means for generating a magnetic field does not exist at the ends of the first target holder (111) and the second target holder (112) on a side of radio-frequency electromagnetic field generation unit (17).
摘要:
(EN) A shower tube cleaning device for a filter for a water tank, configured such that clean water from the filter is returned to the inside of the water tank through a shower tube provided with nozzles. An operating rod (11) extended in a shower tube (5) is connected to a cleaner (10) slidably provided in the shower tube (5). A scraper (12) is fixed to a free end of the operating rod (11), and the scraper (12) is pushed and pulled to make the cleaner (10) reciprocate in a sliding manner, scraping off foreign matter in the shower tube (5). The inner surface of the shower tube can be cleaned with the shower tube connected to a filter.
摘要:
A cleaner for the inside of a water tank utilizing a siphoning action is provided, in which the interior of a water passage (24) between an upstream-side one-way valve (Vu) and a downstream-side one-way valve (Vd) is pressurized or depressurized by a pressing operation of a suction operation tool (A) provided in a bent connecting part between a main body portion (1) and a grip portion (2) of a suction pipe (P), and water-tank water of the main body portion (1) is sucked into the suction pipe (P). This enables waste material such as leftover food within water-tank water to be sucked up together with dirty water by a very simple operation.