摘要:
The invention relates to a micro-sensor comprising: a substrate comprising a first portion and a second portion; a third portion and fourth portion provided between said portions and connected to the first portion and the second portion respectively by an elastic member; detection and counting means comprising: a counting gear, a third beam capable of meshing with the gear, means for amplifying the value of a relative movement between said portions and comprising: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to said plate, the third beam being attached on one side to the plate and comprising a tooth capable of meshing with said gear.
摘要:
The present invention relates to the field of microsensors, and specifically to a passive, reversible deformation sensor, particularly a sensor for detecting deformation cycles in a direction OX of a structure, specifically during cycles of temperature or mechanical stresses to which said structure is subjected, said sensor comprising a means (4, 5, 6) for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, said means comprising a substrate having first and second portions (41, 44) capable of being attached to said two points or areas of the structure, respectively, the detection means being combined with each of said first and second portions of the substrate, characterized in that the detection means comprises means (54 1 , 54 2 , 54 3 , 55 1 , 55 2 , 55 3 , 56 1 , 56 2 , 56 3 ) for distinguishing between at least two different thresholds of cycles of variations in distance.