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    MULTI-PHOTON EXPOSURE SYSTEM
    7.
    发明公开
    MULTI-PHOTON EXPOSURE SYSTEM 有权
    MEHRPHOTONENBELICHTUNGSSYSTEM

    公开(公告)号：EP2257854A2

    公开(公告)日：2010-12-08

    申请号：EP09713903.4

    申请日：2009-02-17

    申请人： 3M Innovative Properties Company

    发明人： DAVOE, Robert, J. ,  GATES, Brian, J. ,  FAKLIS, Dean ,  KRASA, Robert, T. ,  MARKOWICZ, Przemyslaw, P. ,  SYKORA, Craig, R.

    IPC分类号： G03F7/20 ,  H01L21/027

    CPC分类号： G03F7/20 ,  B29C64/135 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  G03F7/2053 ,  G03F7/70375 ,  G03F7/70525 ,  G03F7/7085

    摘要： An exposure system includes a light source emitting a beam along an optical axis that is capable of inducing a multi-photon reaction in a resin. The exposure system further includes a resin undergoing multiphoton reaction, as well as an automated system including a monitor that measures at least one property of the beam selected from power, pulse length, shape, divergence, or position in a plane normal to the optical axis. The monitor generates at least one signal indicative of the property of the beam, and a sub-system adjusts the beam in response to the signal from the monitor.

    摘要翻译： 曝光系统包括沿着光轴发射能够在树脂中引起多光子反应的光束的光源。 曝光系统还包括进行多光子反应的树脂，以及包括监测器的自动化系统，该监视器测量从垂直于光轴的平面中的功率，脉冲长度，形状，发散度或位置中选择的光束的至少一个性质 。 监视器产生指示光束的属性的至少一个信号，并且子系统响应于来自监视器的信号来调整光束。

    CHROMATIC CONFOCAL SENSOR
    8.
    发明公开
    CHROMATIC CONFOCAL SENSOR 有权
    CHROMATISCHER KONFOKALSENSOR

    公开(公告)号：EP2208100A1

    公开(公告)日：2010-07-21

    申请号：EP08837450.9

    申请日：2008-10-03

    申请人： 3M Innovative Properties Company

    发明人： GATES, Brian J. ,  SYKORA, Craig R. ,  FAKLIS, Dean ,  MURNAN, Andrew J. ,  FARMIGA, Nester O.

    IPC分类号： G02B21/00 ,  G02B21/06

    CPC分类号： G02B27/0075 ,  G02B21/0064

    摘要： A system comprising a substrate having thereon a multiphoton curable photoreactive composition, a light source that emits a light beam comprising a plurality of wavelengths onto at least one region of the composition on the substrate, and a detector that detects a portion of light reflected from the composition to obtain a location signal with respect to the substrate, wherein the location signal is based at least on a wavelength of the reflected light.

    摘要翻译： 一种系统，包括其上具有多光子可固化光反应性组合物的基底，在所述基底上的所述组合物的至少一个区域上发射包括多个波长的光束的光源，以及检测器， 以获得相对于衬底的位置信号，其中定位信号至少基于反射光的波长。

    IMAGING SYSTEM FOR THERMAL TRANSFER
    10.
    发明公开
    IMAGING SYSTEM FOR THERMAL TRANSFER 审中-公开
    成像系统热转印

    公开(公告)号：EP1761963A1

    公开(公告)日：2007-03-14

    申请号：EP05736587.6

    申请日：2005-04-19

    申请人： 3M Innovative Properties Company

    发明人： TOLBERT, William A. ,  NELSON, James M. ,  ISBERG, Thomas A. ,  HIGHTOWER, Andrew L. ,  FAKLIS, Dean

    IPC分类号： H01L51/40 ,  B41J2/48

    CPC分类号： G03B27/306 ,  G03B27/16 ,  G03F7/70383

    摘要： An optical imaging system is disclosed for selective thermal transfer of a material from a donor film to a substrate. The imaging system includes a light source assembly that is configured to emit a patterned light beam. The patterned light beam includes a plurality of discrete output light segments where the segments at most partially overlap. The imaging system further includes a light relay assembly that receives and projects the plurality of discrete output light segments onto a transfer plane so as to form a projected light segment by a substantial superposition of the plurality of discrete output light segments. When a donor film that includes a transferable material is placed proximate a substrate that lies in the transfer plane, the projected light segment is capable of inducing a transfer of the transferable material onto the substrate.