公开(公告)号：EP0559313B1

公开(公告)日：1997-06-11

申请号：EP93300288.3

申请日：1993-01-18

Applicant: ADVANCED MICRO DEVICES, INC.

Inventor： Bruce, Victoria J.

IPC: H04N7/18 ,  G01N21/88

CPC classification number: G02B21/00 ,  G01J3/2803 ,  G01J3/443 ,  G01N21/62 ,  G02B21/0016

公开(公告)号：EP0558177A1

公开(公告)日：1993-09-01

申请号：EP93300290.9

申请日：1993-01-18

Applicant: ADVANCED MICRO DEVICES, INC.

Inventor： Bruce, Victoria J.

IPC: G01N21/88

CPC classification number: G01R31/311 ,  G01R31/308

Abstract: Emission microscopy software for analyzing an integrated circuit includes one or more subroutines for determining the location of an emission site based upon a powered down background image and a powered up integrated circuit image; one or more subroutines for controlling an optical dispersing apparatus and a CCD camera shutter set on the emission site to obtain photon counts therein; one or more subroutines for correcting data obtained based upon equipment sensitivities; and one or more subroutines for manipulating data relating to light intensity, wavelength, and energy, as well as relating to volt ages applied to the integrated circuit.

Abstract translation: 用于分析集成电路的发射显微镜软件包括用于基于掉电背景图像和加电集成电路图像来确定发射位置的位置的一个或多个子程序; 用于控制光学分散装置的一个或多个子程序和设置在发射场所上的CCD照相机快门以获得其中的光子计数; 用于校正基于设备灵敏度获得的数据的一个或多个子程序; 以及用于操纵与光强度，波长和能量有关的数据的一个或多个子程序，以及与应用于集成电路的伏特相关。

公开(公告)号：EP0558177B1

公开(公告)日：2000-04-12

申请号：EP93300290.9

申请日：1993-01-18

Applicant: ADVANCED MICRO DEVICES, INC.

Inventor： Bruce, Victoria J.

IPC: G01N21/88

CPC classification number: G01R31/311 ,  G01R31/308

公开(公告)号：EP0559313A1

公开(公告)日：1993-09-08

申请号：EP93300288.3

申请日：1993-01-18

Applicant: ADVANCED MICRO DEVICES, INC.

Inventor： Bruce, Victoria J.

IPC: H04N7/18 ,  G01N21/88

CPC classification number: G02B21/00 ,  G01J3/2803 ,  G01J3/443 ,  G01N21/62 ,  G02B21/0016

Abstract: An emission microscope system includes in various embodiments a catadioptric optical microscope and/or a computer automated optical dispensing system and/or a cryogenically cooled back thinned CCD camera. The system also includes a computer controlled data acquisition system with specially tailored software.

Abstract translation: 放射显微镜系统在各种实施例中包括反射折射光学显微镜和/或计算机自动光学分配系统和/或低温冷却背部薄化CCD照相机。 该系统还包括具有专门定制软件的计算机控制数据采集系统。