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公开(公告)号：EP2510538A4
公开(公告)日：2014-03-26
申请号：EP10836729
申请日：2010-12-10
Applicant: ADVANCED TECH MATERIALS , IBM
Inventor： AFZALI-ARDAKANI ALI , BAUM THOMAS H , BOGGS KARL E , COOPER EMANUEL I , CYWAR DOUGLAS , KERN MATTHEW , KHOJASTEH MAHMOUD , TOTIR GEORGE GABRIEL , NUNES RONALD W
IPC: H01L21/311 , G03F7/42
CPC classification number: H01L21/31133 , G03F7/423
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