公开(公告)号：EP0478801A1

公开(公告)日：1992-04-08

申请号：EP91908474.9

申请日：1991-04-17

申请人： ADVANTEST CORPORATION

发明人： MATSUMURA, Takashi

IPC分类号： G01J3/453

CPC分类号： G01J3/4535

摘要： A reference beam is allowed to be incident into a Michelson interferometer and a reference interference electric signal which changes sinusoidally with the movement of a movable reflector (14) in accordance with interference of the reference beam is obtained. A control circuit (21) applies a direction control signal representing the direction of the movement of the movable reflector (14) to a two-phase signal generator (32B). In response to the indicated direction, this generator generates a two-phase signal either one of the phases of which is advanced by 90°, and applies this two-phase signal as a feedback signal to a servo driving circuit (19). The control circuit (21) applies a movement control signal to the servo driving circuit (19) and controls the movement of the movable reflector (14), so that high precision control becomes possible in accordance with accuracy of the wavelength of the reference beam.

摘要翻译： 参考光束被允许入射到迈克尔逊干涉仪中，并且获得与根据参考光束的干涉可移动反射器（14）的运动正弦曲线改变的参考干涉电信号。 控制电路（21）将表示可移动反射器（14）的移动方向的方向控制信号施加到两相信号发生器（32B）。 响应于指示的方向，该发生器产生两相信号，其中的一个相位提前90度，并将该两相信号作为反馈信号施加到伺服驱动电路（19）。 控制电路（21）向伺服驱动电路（19）施加移动控制信号并控制可动反射器（14）的移动，从而可以根据参考光束的波长的精度进行高精度控制。

公开(公告)号：EP0478801B1

公开(公告)日：1995-02-08

申请号：EP91908474.9

申请日：1991-04-17

申请人： ADVANTEST CORPORATION

发明人： MATSUMURA, Takashi

IPC分类号： G01J3/453

CPC分类号： G01J3/4535

摘要： A reference beam is allowed to be incident into a Michelson interferometer and a reference interference electric signal which changes sinusoidally with the movement of a movable reflector (14) in accordance with interference of the reference beam is obtained. A control circuit (21) applies a direction control signal representing the direction of the movement of the movable reflector (14) to a two-phase signal generator (32B). In response to the indicated direction, this generator generates a two-phase signal either one of the phases of which is advanced by 90°, and applies this two-phase signal as a feedback signal to a servo driving circuit (19). The control circuit (21) applies a movement control signal to the servo driving circuit (19) and controls the movement of the movable reflector (14), so that high precision control becomes possible in accordance with accuracy of the wavelength of the reference beam.