AN OPTICAL INTEGRITY MONITORING APPARATUS FOR AN OPTICAL SYSTEM

    公开(公告)号:EP4198480A1

    公开(公告)日:2023-06-21

    申请号:EP21400025.9

    申请日:2021-12-16

    摘要: An optical system 100 includes a laser 120, at least one optical element 130 between the laser 120 and an optical system exit plane 110, an optical source 140 that generates light 145 within a predetermined wavelength range 410 in response to being excited by at least a part of the laser beam 125, and a light detector 150 that is coupled to the laser 120 and adapted for receiving at least a portion 147 of the light 145 from the optical source 140, wherein the light detector 150 controls the laser 120 if the light detector 150 fails to receive the at least a portion 147 of the light 145 from the optical source 140 or detects that an intensity of the at least a portion 147 of the light 145 received from the optical source 140 is outside a predetermined intensity range.