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2.发明公开Chemoresistor type gas sensor having a multi-storey architecture 审中-公开Gassensor vom Chemoresistortyp mit einermehrstöckigenArchitektur
公开(公告)号：EP2533037A1
公开(公告)日：2012-12-12
申请号：EP11305707.9
申请日：2011-06-08
IPC分类号： G01N27/12
CPC分类号： G01N27/16 , G01N27/125 , G01N27/128
摘要： A multi-storey gas sensor is constructed by stacking chemoresistor type gas sensing elements (CH1,CH2) and providing holes through each sensing element, at least in the region where the sensing layer (52) is formed, so that gas can pass from one sensing element to the next, through the sensing layers (52). A rich set of measurements can be obtained, enabling the characterisation/analysis of a gas under test with increased accuracy and/or the tailoring of the measurements to the particular gas-sensing application: notably by selecting appropriate combinations of materials for the sensing layers of the different gas-sensing elements and by varying the operating conditions applicable to the different gas-sensing elements notably by: taking measurements at respective times when different combinations of sensing layers in the stack are activated, at times when given sensing layers are heated to different temperatures or according to different heating profiles, and/or when selected sensing layers are exposed to UV light. Sensor sensitivity and selectivity can be increased by applying UV pulses of controlled duration. For miniaturization, and increased measurement-speed, each sensing element (CH1,CH2) may have a micro-hotplate architecture.
摘要翻译： 多层气体传感器至少在形成感测层（52）的区域中堆叠化学电阻型气体感测元件（CH1，CH2）并提供穿过每个感测元件的孔，从而使气体从一个 感测元件到下一个，通过感测层（52）。 可以获得丰富的测量结果，使得能够以更高的精度和/或对特定气体感测应用的测量的定制来对待测气体进行表征/分析：特别是通过选择用于感测层的材料的适当组合 不同的气体感测元件和通过改变适用于不同气体感测元件的操作条件，特别是通过以下步骤：当堆叠中的感测层的不同组合被激活时，在各个时间进行测量，有时将给定的感测层加热到不同的气体感测元件 温度或根据不同的加热曲线，和/或当选定的感测层暴露于紫外光时。 传感器灵敏度和选择性可以通过施加持续时间的UV脉冲来增加。 为了小型化和提高测量速度，每个感测元件（CH1，CH2）可能具有微电热板结构。
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